DFD6361-Maintenance - 第35页

A-19 θ -axis positio n detection section For θ - axis position detection, photointerrupters are installed at the clockwise and counterclockwise rotation angle end limit. NOTICE The machine uses pho tointerru pters to det…

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A-18
2-5. θ-axis Section
θ-axis section component names
The θ-axis section consists of the following components.
Center ring
Chuck table
Table base
Waterproof cover
Insulation base
Direct drive motor
Motor base
θ-axis drive section mechanism
The θ-axis drive section is structured as follows:
Drive section Uses a direct-drive motor to drive the chuck table directly
and provides closed-loop control using a rotary encoder.
Position On the top of the X-axis slide base, the direct-drive motor,
insulation base, table base and chuck table are stacked in
the order named.
Rotation angle
The axis provides 60 ° counterclockwise and 320 °
clockwise rotation from the origin. The maximum rotation
angle of this machine is 380 °.
Rotating
operation
Pressing the buttons causes the θ -axis to
rotate through 0.005 °. Therefore, alignment can be
accomplished with ease.
A-19
θ-axis position detection section
For θ-axis position detection, photointerrupters are installed at the clockwise
and counterclockwise rotation angle end limit.
NOTICE
The machine uses photointerrupters to detect an axis position.
The photointerrupter provides the reference for the axis origin
position. If the axis origin is displaced from its proper position, this
may lead to a failure of the machine. Therefore, if any associated
parts need to be replaced, contact your nearest DISCO Service
Office.
Sensor Name Sensor Position Operation
CCW
(counterclockwise)
end sensor
Origin (Positioned from
61 ° to 65 ° CW from
the CCW end sensor
actuation position)
Provides the reference
position for initialization,
setup, cutting and alignment
operations.
Rotation end limit Detects the rotation angle
maximum stroke.
CW (clockwise)
end sensor
Rotation end limit Detects the rotation angle
maximum stroke.
CCW
CW
CCW sensor
FRONT
CW sensor
A-20
Workpiece chucking section
Workpiece chucking on the chuck table is carried out using a vacuum which is
produced by an ejector.
The vacuum path is shown in the following figure.
Workpiece vacuum
Frame clamp
Ceramic porous Chuck table
Table base
Table anchoring vacuum