DFD6361-Maintenance - 第36页

A-20 W or kpiece chucking section Workpiece chucking on t he chuck table is car ried out using a vacuum whic h is produced b y an ejector. The vacuum path is shown in the following figure. W or kpiece vacuum Frame clam p…

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A-19
θ-axis position detection section
For θ-axis position detection, photointerrupters are installed at the clockwise
and counterclockwise rotation angle end limit.
NOTICE
The machine uses photointerrupters to detect an axis position.
The photointerrupter provides the reference for the axis origin
position. If the axis origin is displaced from its proper position, this
may lead to a failure of the machine. Therefore, if any associated
parts need to be replaced, contact your nearest DISCO Service
Office.
Sensor Name Sensor Position Operation
CCW
(counterclockwise)
end sensor
Origin (Positioned from
61 ° to 65 ° CW from
the CCW end sensor
actuation position)
Provides the reference
position for initialization,
setup, cutting and alignment
operations.
Rotation end limit Detects the rotation angle
maximum stroke.
CW (clockwise)
end sensor
Rotation end limit Detects the rotation angle
maximum stroke.
CCW
CW
CCW sensor
FRONT
CW sensor
A-20
Workpiece chucking section
Workpiece chucking on the chuck table is carried out using a vacuum which is
produced by an ejector.
The vacuum path is shown in the following figure.
Workpiece vacuum
Frame clamp
Ceramic porous Chuck table
Table base
Table anchoring vacuum
A-21
2-6. Spinner Section
Spinner section component names
The spinner section consists of the following components.
Rotary section
AC servomotor
Washing nozzle
Stepping motor for nozzle
Main unit
Spinner section mechanism
The spinner section is structured as follows:
Main unit This is the base body of the spinner section. It raises
and lowers the spinner table with an air cylinder. The
cover that encloses the entire unit prevents cleaning
liquid from splashing.
Washing nozzle
section
The spray nozzle and drying nozzle, driven by the
stepping motor, move repeatedly across on the spinner
table.
Spinner rotary
section
Workpieces are placed on the spinner porous table and
vacuum-chucked. Cleaning, drying and transport
positioning are performed on the table rotated by the
AC servomotor.