DFD6361-Maintenance - 第366页

D-81 V0514 : Spinner tabl e up error . Error c ode V0514 Message Spinner table up error. W hat wa s detected The up senso r input was no t issued upon u pward mov ement of the sp inner table. During what operation it occ…

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D-80
V0513 : Spinner table vacuum error.
Error code
V0513
Message
Spinner table vacuum error.
What was
detected
The vacuum pressure measured by the vacuum sensor cannot reach the
predefined value when the spinner table vacuum is turned ON.
The criterion of vacuum ON/OFF is the lower limit of [S/T work vacuum]
of the SENSOR THRESHOLD DATA screen [screen 6.6].
During what
operation it
occurred
Any time while the spinner table vacuum is ON.
State after
detection
Spinner cleaning operation stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
pressure of the S/T
vacuum is
sufficient.
The vacuum lower
limit value is
improper.
Correct the value of
[Lower limit] of
[S/T work
vacuum].
The vacuum
pressure does not
increase.
Abendinthe
vacuum line piping.
Contact your
nearest DISCO
Service Office.
Clogging of the
vacuum ejector.
Replace the
vacuum ejector.
The vacuum leaks. The attaching tape is
loose.
Replace the tape.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-81
V0514 : Spinner table up error.
Error code
V0514
Message
Spinner table up error.
What was
detected
The up sensor input was not issued upon upward movement of the spinner
table.
During what
operation it
occurred
During spinner table up operation.
State after
detection
The spinner table moves down.
Transport stops.
Phenomenon Probable causes Remedy Reference
What to do
An error is issued
even though the
spinner table moves
upward.
The sensor position
is deviated.
Contact your
nearest DISCO
Service Office.
The sensor is
defective.
Replace the sensor.
The spinner table
does not ascend.
The spinner table up-
down air cylinder
piping is bent or
clogged.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-82
V0515 : Spinner table down error.
Error code
V0515
Message
Spinner table down error.
What was
detected
The down sensor input was not issued upon downward movement of the
spinner table.
During what
operation it
occurred
During spinner table down operation.
State after
detection
The spinner table moves up.
Transport stops.
Phenomenon Probable causes Remedy Reference
What to do
An error is issued
even though the
spinner table moves
downward.
The sensor position
is deviated.
Contact your
nearest DISCO
Service Office.
The sensor is
defective.
Replace the sensor.
The spinner table
does not descend.
The spinner table up-
down air cylinder
piping is bent or
clogged.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear