DFD6361-Maintenance - 第38页
A-22 Spin ner sec tion me chanism (Contin ued) Spinner table Various types of tables correspondin g to the f ollowing DISCO fram es are avai lable. R eplace them ac cording to the frame to be used. [DFD6351] For DTF2-8-1…
A-21
2-6. Spinner Section
Spinner section component names
The spinner section consists of the following components.
Rotary section
AC servomotor
Washing nozzle
Stepping motor for nozzle
Main unit
Spinner section mechanism
The spinner section is structured as follows:
Main unit This is the base body of the spinner section. It raises
and lowers the spinner table with an air cylinder. The
cover that encloses the entire unit prevents cleaning
liquid from splashing.
Washing nozzle
section
The spray nozzle and drying nozzle, driven by the
stepping motor, move repeatedly across on the spinner
table.
Spinner rotary
section
Workpieces are placed on the spinner porous table and
vacuum-chucked. Cleaning, drying and transport
positioning are performed on the table rotated by the
AC servomotor.
A-22
Spinner section mechanism (Continued)
Spinner table Various types of tables corresponding to the following
DISCO frames are available. Replace them according to
the frame to be used.
[DFD6351]
For DTF2-8-1
For DTF2-6-1
For DTF2-6
For DTF2-5-1
[DFD6361]
For DTF2-12
For DTF2-8-1
A-23
2-7. Elevator Section
Elevator section component names
The elevator section consists of the following components.
Linear guide
Ball-bearing leadscrew
FRONT
AC servomotor
Cassette stage
Elevator section mechanism
The elevator section is structured as follows:
Driving source An AC servomotor and ball-bearing leadscrew
combination moves the cassette stage up and down.
Workpieces in the cassette are loaded or unloaded by
the push-pull arm.