DFD6361-Maintenance - 第383页
D-98 V1025 : Lower Arm v acuum er ror. Error c ode V1025 Message Lower Arm vacuum error. W hat wa s detected The vacuum pressure meas ured by the v acuum sensor cannot reach the predefined value when the low er arm vacuu…

D-97
V1024 : Upper Arm vacuum error.
Error code
V1024
Message
Upper Arm vacuum error.
What was
detected
The vacuum pressure measured by the vacuum sensor cannot reach the
predefined value when the upper arm vacuum is turned ON.
The criterion of vacuum ON/OFF is the lower limit of [Upper arm vacuum]
of the SENSOR THRESHOLD DATA screen [screen 6.6].
During what
operation it
occurred
Any time while the upper arm vacuum is ON.
State after
detection
Transport stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
pressure of the
upper arm vacuum
is sufficient.
The vacuum lower
limit value is
improper.
Correct the value of
[Lower limit] of
[Upper arm
vacuum].
The sensor is
defective.
Replace the sensor.
The vacuum is not
operating normally.
The vacuum ejector
is clogged.
Replace the
vacuum ejector.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear

D-98
V1025 : Lower Arm vacuum error.
Error code
V1025
Message
Lower Arm vacuum error.
What was
detected
The vacuum pressure measured by the vacuum sensor cannot reach the
predefined value when the lower arm vacuum is turned ON.
The criterion of vacuum ON/OFF is the lower limit of [Lower arm vacuum]
of the SENSOR THRESHOLD DATA screen [screen 6.6].
During what
operation it
occurred
Any time while the lower arm vacuum is ON.
State after
detection
Transport stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
pressure of the
lower arm vacuum
is sufficient.
The vacuum lower
limit value is not
proper.
Correct the value of
[Lower limit] of
[Lower arm
vacuum].
The sensor is
defective.
Replace the sensor.
The vacuum is not
operating normally.
The vacuum ejector
is clogged.
Replace the
vacuum ejector.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear

D-99
V1037 : Remove the workpiece at UV Stage.
Error code
V1037
Optional accessory
Message
Remove the workpiece at UV Stage.
What was
detected
There was an input to UV section workpiece check sensor when "
CONTINUE AFTER REMOVING WORKPIECE " was selected at the
time of workpiece loading to the UV section, or after transport error
occurrence.
During what
operation it
occurred
At the time of workpiece loading to the UV section.
State after
detection
Transport will stop.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even though there
is no workpiece at
the UV section.
The sensor is
defective.
Contact you
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Remove the workpiece from the UV section.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE " from the
recovery screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear