DFD6361-Maintenance - 第385页

D-100 V1038 : UV Gl ass plate close error. Error c ode V1038 Option al accesso ry Message UV Glass plate close err or. W hat wa s detected There wa s no input t o the ri ght or left cylinder u pper posi tion sensor w hen…

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D-99
V1037 : Remove the workpiece at UV Stage.
Error code
V1037
Optional accessory
Message
Remove the workpiece at UV Stage.
What was
detected
There was an input to UV section workpiece check sensor when "
CONTINUE AFTER REMOVING WORKPIECE " was selected at the
time of workpiece loading to the UV section, or after transport error
occurrence.
During what
operation it
occurred
At the time of workpiece loading to the UV section.
State after
detection
Transport will stop.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even though there
is no workpiece at
the UV section.
The sensor is
defective.
Contact you
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Remove the workpiece from the UV section.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE " from the
recovery screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-100
V1038 : UV Glass plate close error.
Error code
V1038
Optional accessory
Message
UV Glass plate close error.
What was
detected
There was no input to the right or left cylinder upper position sensor when
the glass plate was tried to close at the time of workpiece loading to the
UV section.
During what
operation it
occurred
At the time of workpiece loading to the UV section.
State after
detection
Transport will stop.
Phenomenon Probable causes Remedy Reference
What to do
The glass plate
does not close.
Interference by UV
plate.
Check the
installation of
UV plate.
The cylinder is
broken.
Contact your
nearest DISCO
Service Office.
The air piping is
bent.
Contact your
nearest DISCO
Service Office.
The error occurs
even though the
glass plate closes.
The sensor is
defective.
Replace the
sensor.
Displacement of the
sensor.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Select "CONTINUE" from the recovery screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-101
V1039 : UV Glass plate open error.
Error code
V1039
Optional accessory
Message
UV Glass plate open error.
What was
detected
There was no input to the right or left cylinder lower position sensor when
the glass plate was tried to open at the time of workpiece loading to the
UV section, or workpiece unloading from the UV section after completion
of UV irradiation.
During what
operation it
occurred
At the time of workpiece loading to the UV section, or workpiece
unloading from the UV section.
State after
detection
Transport will stop.
Phenomenon Probable causes Remedy Reference
What to do
The glass plate
does not open.
Interference by UV
plate.
Check the
installation of
UV plate.
The cylinder is
broken.
Contact your
nearest DISCO
Service Office.
The air piping is
bent.
Contact your
nearest DISCO
Service Office.
The error occurs
even though the
glass plate opens.
The sensor is
defective.
Replace the
sensor.
Displacement of the
sensor.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Select "CONTINUE" from the recovery screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear