DFD6361-Maintenance - 第404页

D-119 A0552 : F ocus mai ntenance has no t been do ne. Error c ode A0552 Message Focus maint enance has no t been done. W hat wa s detected Error di splay is m ade if focu s mainten ance is not d one before au to focu s …

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D-118
A0551 : The work thickness is thicker.
Error code
A0551
Message
The work thickness is
thicker.
What was
detected
This error occurs if, in auto focusing during auto alignment, the measured
thickness of the workpiece exceeded the limit value for workpiece
thickness.
During what
operation it
occurred
Upon conclusion of initial auto focusing during auto alignment.
State after
detection
Auto alignment operation is discontinued.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
frequently.
The variation in
workpiece thickness
is large.
Consider the
column
<THICKNESS
CHECK BY
FOCUS LIMIT>
on the
OPERATION
DATA
MAINTENANCE
screen [screen
5.3.1].
The workpiece
thickness input value
error or limit value is
too small.
Check the device
data of the column
<THICKNESS
CHECK BY
FOCUS LIMIT>
on the
OPERATION
DATA
MAINTENANCE
screen [screen
5.3.1].
Out of focus.
Perform the focus
maintenance.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (ALIGNMENT)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-119
A0552 : Focus maintenance has not been done.
Error code
A0552
Message
Focus maintenance has not been done.
What was
detected
Error display is made if focus maintenance is not done before auto focus
operation.
During what
operation it
occurred
Before execution of auto focusing.
State after
detection
Auto focus operation is discontinued.
Phenomenon Probable causes Remedy Reference
What to do
Recovery
(1) Cancel the alarm.
(2) Call up the FOCUS MAINTENANCE screen [6.4 screen], and effect
focus maintenance.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-120
A1164 : Y axes will get near too much.
Error code
A1164
Message
Y axes will get near too much.
What was
detected
Since the Y1- and Y2-axes get close each other, there was input in the Y-
axis collision avoidance sensor.
During what
operation it
occurred
During auto alignment operation.
State after
detection
Auto alignment operation is temporarily halted.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
frequently.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (ALIGNMENT)
screen is displayed.
(2) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear