DFD6361-Maintenance - 第42页
A-26 Inspection s ection The workpiece is carrie d to this section in order to be inspe cted. ÿ Inspection co ver (Inspec tion W orkpiece Door) FRONT Inspection p late
A-25
Cassette stage (Continued)
[Kinematic specification cassette (only supported by DFD6361)]
On the cassette stage, there are the kinema pins which prevent the cassette
from moving off the setting position.
ÿ
Kinema pin
A-26
Inspection section
The workpiece is carried to this section in order to be inspected.
ÿ
Inspection cover
(Inspection Workpiece Door)
FRONT
Inspection plate
A-27
Components of UV irradiation unit [Optional accessory]
Inspection cover
Irradiation shield plate
Glass plate
FRONT
UV lamp
(Inspection workpiece door)
Inspection plate