DFD6361-Maintenance - 第432页
D-147 O0520 : R emov e the workpi ece at C/ T. Error c ode O0520 Message Remo ve t he workp ie ce at C/T. W hat wa s detected There is an input to the chuck table vacu um sensor wh en you sel ect "CONTINUE AFT ER RE…
D-146
O0519 : Remove the workpiece at W/T.
Error code
O0519
Message
Remove the workpiece at W/T.
What was
detected
There is an input to the workpiece check sensor of prealignment stage
when you select "CONTINUE AFTER REMOVING WORKPIECE" on
the ERROR RECOVERY (HANDLING) screen, which is invoked by a
transfer error.
During what
operation it
occurred
While a workpiece is loading or unloading.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when there is
no workpiece on
the prealignment
stage.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the prealignment stage.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-147
O0520 : Remove the workpiece at C/T.
Error code
O0520
Message
Remove the workpiece at C/T.
What was
detected
There is an input to the chuck table vacuum sensor when you select
"CONTINUE AFTER REMOVING WORKPIECE" on the ERROR
RECOVERY (HANDLING) screen, which is invoked by a transfer error,
or while workpiece is being loaded onto the chuck table.
During what
operation it
occurred
While a workpiece is loading.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when there is
no workpiece on
the chuck table.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the chuck table.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-148
O0522 : Remove the workpiece at S/T.
Error code
O0522
Message
Remove the workpiece at S/T.
What was
detected
There is an input to the spinner table vacuum sensor when you select
"CONTINUE AFTER REMOVING WORKPIECE" on the ERROR
RECOVERY (HANDLING) screen, which is invoked by a transfer error,
or while workpiece is being loaded onto the spinner table.
During what
operation it
occurred
While a workpiece is loading to the spinner table.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when there is
no workpiece on
the spinner table.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the spinner table.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear