DFD6361-Maintenance - 第435页
D-150 O1029 : R emove the w orkpiece at L ower Arm . Error c ode O1029 Message Remo ve t he wor kpie ce at Lowe r A rm. W hat wa s detected There is an in put to the lower arm vacuum sensor whe n you select "CONTINU…

D-149
O1028 : Remove the workpiece at Upper Arm.
Error code
O1028
Message
Remove the workpiece at Upper Arm.
What was
detected
There is an input to the upper arm vacuum sensor when you select
"CONTINUE AFTER REMOVING WORKPIECE" on the ERROR
RECOVERY (HANDLING) screen, which is invoked by a transfer error.
During what
operation it
occurred
While a workpiece is loading or unloading.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
upper arm sucks no
workpiece.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the upper arm.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear

D-150
O1029 : Remove the workpiece at Lower Arm.
Error code
O1029
Message
Remove the workpiece at Lower Arm.
What was
detected
There is an input to the lower arm vacuum sensor when you select
"CONTINUE AFTER REMOVING WORKPIECE" on the ERROR
RECOVERY (HANDLING) screen, which is invoked by a transfer error.
During what
operation it
occurred
While a workpiece is loading or unloading.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
lower arm sucks no
workpiece.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the lower arm.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear

D-151
O1036 : Inspection cassette switch turned OFF.
Error code
O1036
Message
Inspection cassette switch turned OFF.
What was
detected
This error occurs if the inspection cassette presence/absence sensor
mounted on the inspection cassette stage receives OFF signal.
During what
operation it
occurred
During the full automatic operation and while the elevator is moving.
State after
detection
The elevator operation stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
although the
cassette is placed
properly.
The sensor is
defective.
Replace the sensor.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Set the cassette to the elevator again.
(3) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear