DFD6361-Maintenance - 第48页
A-32 2-10. Micro scope Section Microscope sec tion compo nent names The microscope section consists of the following components. [1-axis] FRONT High m agnification m icroscope Low m agnification m icroscope CCD cam era […
A-31
Transport section mechanism
The transport section is structured as follows:
[Lower arm section]
Function This arm performs transport from the pre-alignment
stage to the chuck table and transport to the workpiece
holding section after washing.
Universal pad arm Universal pad capable of one-touch switch to each type
of frame.
Drive system Front and rear
drive
- Driven by air cylinder.
- Slide mechanism by a linear guide.
Vertical drive - Driven by two air cylinders.
- Slide mechanism by a linear guide.
Transfers workpieces while changing
its height according to the following
position or condition.
- Pre-alignment stage
- Chuck table and spinner table
- During transporting a workpiece
[Upper arm section]
Function This arm transports workpieces from the chuck table to
the spinner.
Universal pad arm Universal pad capable of one-touch switch to each type
of frame.
Drive system Front and rear
drive
- Driven by air cylinder.
- Slide mechanism by a linear guide.
Vertical drive - Driven by air cylinder.
A-32
2-10. Microscope Section
Microscope section component names
The microscope section consists of the following components.
[1-axis]
FRONT
High magnification microscope
Low magnification microscope
CCD camera
[High magnification microscope] [Low magnification microscope]
Low magnification (
×
0.75)
High magnification (
×
7.5)
Macro direct light
source (LED)
Micro direct light
source (LED)
Fiber of macro
oblique light source
Fiber of micro
oblique light source
A-33
Microscope section component names (Continued)
[2-axis]
FRONT
High magnification microscope
CCD camera
[High magnification microscope]
High magnification (
×
7.5)
Micro direct light
source (LED)
Fiber of micro
oblique light source