DFD6361-Maintenance - 第513页
E-77 Procedur es for cl eanin g the vacuu m ejector ( Continued) Step No. Do This 3 Shut off the facility power supply. 4 Close the facility main valve of air. 5 Remove the cover [H]. Then s tore it sufficiently awa y fr…
E-76
6-1. Cleaning the Vacuum Ejector
Procedures for cleaning the vacuum ejector
WARNING
When you perform the procedure set forth in this section, you have to
place your hands in a drive section. If you perform maintenance with
the power ON, your fingers or hands may be caught or cut off.
Turn OFF the machine and shut off the facility power supply before
starting this procedure.
Also, ensure that no other person touches the machine during
cleaning.
CAUTION
When you perform maintenance with the outer cover removed,
observe the following precaution. If you stand the removed outer
cover against the machine, you may receive injury by the cover if it is
toppled by the earthquake or like that.
After taking off the outer cover for maintenance purposes, store it
sufficiently away from the working area.
CAUTION
- When you remove the vacuum ejector, exercise care not to drop
water from it. Water drip adhering on the machine could lead to
machine trouble.
- If water scatters during blowing of the vacuum ejector inside and
water drip adheres on the machine, it could lead to machine trouble.
Keep away from the machine when you blow the interior of the
vacuum ejector by air.
Step No. Do This
1
Turn OFF the main switch and then remove the key.
2
Turn OFF the circuit breaker on the left of the machine. Lock out
the circuit breaker lever with a padlock or the like.
E-77
Procedures for cleaning the vacuum ejector (Continued)
Step No. Do This
3
Shut off the facility power supply.
4
Close the facility main valve of air.
5
Remove the cover [H]. Then store it sufficiently away from the
working area.
- For the cover removal procedures;
See the section B-2-2, [Removing the Machine Outer Cover
and Status Indicator] of Installation Manual.
ÿ
[H]
LEFT SIDE
6
Disconnect the vacuum ejector and its piping as an assembly.
Then blow the inside of the vacuum ejector by air at the location
where water drip does not adhere on the machine.
Vacuum ejector
E-78
Procedures for cleaning the vacuum ejector (Continued)
Step No. Do This
6
(Continued)
V
P
E
Blow air to clean
Air OUTAir IN
Non returned valve
(Only MOEGH020)
Part Name Manufacturer Part No. Usage
MOEGH020 For chuck table
Forspinnertable
For lower arm
Ejector SMC
For upper arm
7
Reinstall the vacuum ejector and its piping to their original
positions.
8
Reinstall the cover [H] in its original position.
- For the cover installation procedure;
See the section B-1-6, [Mounting Machine Outer Covers] of
Installation Manual.
9
Turn ON the facility power source.
10
Open the facility main valve of air.
11
Open the circuit breaker lever lockout and then turn ON the
circuit breaker.
12
Insert the key into the main switch and turn ON the main switch.