DFD6361-Maintenance - 第572页
F-2 1. Consumables to Be Replaced at 365-Day (Recommended) Intervals Summary of this sectio n This section describes co nsumables to be replaced at 365-da y intervals. Section No. Titl e Contents 1-1 Replacin g the Air C…
F-1
F. CONSUMABLE PARTS REPLACEMENT
Contents of this chapter
This chapter describes consumable parts replacement by their replacement intervals.
Section
No.
Title Contents
Replacing the air clean unit consumable
part
Replacing the halogen lamp
Replacing the microscope LED light
(Contact your nearest Disco Service
Office.)
Replacing the spindle carbon brush
Replacing the spray tip of the spinner
section
Replacing the pad of the upper arm section
Replacing the pad of the lower arm section
1
Consumables to Be Replaced at
365-Day Intervals
(Recommended)
Replacing the spinner section roll cover
Replacing the spindle coolant water flow
rate sensor
2
Consumables to Be Replaced at
700-Day Intervals
(Recommended)
Replacing the solenoid valve
Replacing the bellows
Replacing the waterproof cover of θ-axis
Replacing the O-ring for θ-axis
Replacing the V-ring for θ-axis
Replacing the chuck table center ring
3
Consumables to Be Replaced at
1000-Day Intervals
(Recommended)
Replacing the spinner table O-ring
Replacing the flowmeter
4
Consumables to Be Replaced at
1800-Day Intervals
(Recommended)
Replacing the hard disk drive
(Contact your nearest Disco Service
Office.)
Replacing the spinner high- pressure pump
consumable part
Replacing the fluorescent lamp
Replacing the UV irradiation lamp
Replacing the controller of the wheel
coolant water
5
Consumables Whose
Replacement
Intervals Differ
Depending on the Machine Use
Conditions
Replacing the circuit board of the
electrical system due to life end of its
battery
(Contact your nearest Disco Service
Office.)
F-2
1. Consumables to Be Replaced at 365-Day
(Recommended) Intervals
Summary of this section
This section describes consumables to be replaced at 365-day intervals.
Section No. Title Contents
1-1 Replacing the Air Clean
Unit Consumable Parts
- Procedures for replacing the mist
separator element
- Procedures for replacing the air
filter
1-2 Replacing the Halogen
Lamp
- Procedures for replacing the
halogen lamp
1-3 Replacing the Microscope
LED Light
- Procedures for replacing the
microscope LED light
1-4 Replacing the Spindle
Carbon Brush
- Procedures for replacing the
spindle carbon brush
1-5 Replacing the Spray Tip
of the Spinner Section
- Procedures for replacing the
spray tip of the spinner section
1-6 Replacing the Pad of the
Upper Arm Section
- Procedures for replacing the pad
of the upper arm section
1-7 Replacing the Pad of the
Lower Arm Section
- Procedures for replacing the pad
of the lower arm section
1-8 Replacing the Spinner
Section Roll Cover
- Procedures for replacing the
spinner section roll cover
F-3
1-1. Replacing the Air Clean Unit Consumable Parts
Safety items for replacing the air clean unit consumable parts
WARNING
When performing the procedure set forth in this section, you have to
place your hands in a drive section. If you perform maintenance with
the power ON, your fingers or hands may be caught or cut off.
Turn OFF the machine and shut off the facility power supply before
starting this procedure.
Also, ensure that no other person touches the machine during
operation.
CAUTION
When performing maintenance with the outer cover removed,
observe the following precaution. If you stand the removed outer
cover against the machine, you may receive injury by the cover if it is
toppled by the earthquake or like that.
When you take off the outer cover for maintenance purposes, store it
sufficiently away from the working area.
NOTICE
- It is possible that air leakage might occur because rubber parts in
the air clean unit could be degraded by ozone that is included in the
air.
If you experience an air leakage occurred by such cause, contact
your nearest DISCO.
- Used air filters are soiled with dirt and oil content. Dispose them in
accordance with appropriate environmental regulations.