DFD6361-Maintenance - 第573页
F-3 1-1. Re placing the Air Clean Unit Consumable Parts Safety ite ms for repl acing the air c lean unit c onsumable parts W ARNING W he n per f ormi ng the p rocedure set for th in thi s section, y ou have to place your…
F-2
1. Consumables to Be Replaced at 365-Day
(Recommended) Intervals
Summary of this section
This section describes consumables to be replaced at 365-day intervals.
Section No. Title Contents
1-1 Replacing the Air Clean
Unit Consumable Parts
- Procedures for replacing the mist
separator element
- Procedures for replacing the air
filter
1-2 Replacing the Halogen
Lamp
- Procedures for replacing the
halogen lamp
1-3 Replacing the Microscope
LED Light
- Procedures for replacing the
microscope LED light
1-4 Replacing the Spindle
Carbon Brush
- Procedures for replacing the
spindle carbon brush
1-5 Replacing the Spray Tip
of the Spinner Section
- Procedures for replacing the
spray tip of the spinner section
1-6 Replacing the Pad of the
Upper Arm Section
- Procedures for replacing the pad
of the upper arm section
1-7 Replacing the Pad of the
Lower Arm Section
- Procedures for replacing the pad
of the lower arm section
1-8 Replacing the Spinner
Section Roll Cover
- Procedures for replacing the
spinner section roll cover
F-3
1-1. Replacing the Air Clean Unit Consumable Parts
Safety items for replacing the air clean unit consumable parts
WARNING
When performing the procedure set forth in this section, you have to
place your hands in a drive section. If you perform maintenance with
the power ON, your fingers or hands may be caught or cut off.
Turn OFF the machine and shut off the facility power supply before
starting this procedure.
Also, ensure that no other person touches the machine during
operation.
CAUTION
When performing maintenance with the outer cover removed,
observe the following precaution. If you stand the removed outer
cover against the machine, you may receive injury by the cover if it is
toppled by the earthquake or like that.
When you take off the outer cover for maintenance purposes, store it
sufficiently away from the working area.
NOTICE
- It is possible that air leakage might occur because rubber parts in
the air clean unit could be degraded by ozone that is included in the
air.
If you experience an air leakage occurred by such cause, contact
your nearest DISCO.
- Used air filters are soiled with dirt and oil content. Dispose them in
accordance with appropriate environmental regulations.
F-4
Safety items for replacing the air clean unit consumable parts (Continued)
NOTICE
There is a red pop-up valve on the top of the air clean unit. When the
consumables of the air clean unit come to the end of their life cycles,
the red valve pops up to indicate that consumables need replacing.
In this case, replace the consumables to the new ones even before
the predetermined replacement timing.
Pop-up valve (red)
Normal status
When consumables need
replacing, the valve pops up.
[Air clean unit]