DFD6361-Maintenance - 第582页
F-12 1-2. Re placing the Halogen Lamp Procedur es for replaci ng the halogen lamp W ARNING - W hen y o u per f orm th e procedure s et forth i n this section , you h ave to place y our hands i n a drive section. If y ou …
F-11
1-1-4. Completion of replacing the air clean unit consumable
parts
Procedures for completion of replacing the air clean unit consumable parts
Step No. Do This
(Continued from the previous section.)
1
Open the facility air supply main valve to make sure that no air
leakage occurs.
2
Reinstall the cover [A] and [B].
- For the cover installation procedure;
See the section B-1-6, [Mounting Machine Outer Covers] of
Installation Manual.
F-12
1-2. Replacing the Halogen Lamp
Procedures for replacing the halogen lamp
WARNING
- When you perform the procedure set forth in this section, you have
to place your hands in a drive section. If you perform maintenance
with the power ON, your fingers or hands may be caught or cut off.
Turn OFF the machine and shut off the facility power supply before
starting this procedure.
Also, ensure that no other person touches the machine during
operation.
- The halogen lamp, which is located in the light source box, retains
heat for a while after you turn OFF the machine power.
In order to avoid suffering burn, before performing maintenance,
wait at least 20 minutes after shutting off the power supply.
NOTICE
Neither safety goggles, protective gloves, stepstools, flashlights nor
alcohol, all of which are necessary for maintenance work, are not
supplied with the machine. Use what are furnished in your factory or
what comply with your factory's standards.
Operation flow
The procedure for replacing the halogen lamp consists of the following steps.
1-2-1 Preparation of replacing the halogen lamp
1-2-2 Replacing the halogen lamp
Before replacement
Have on hand the following items for replacing.
- Phillips screwdriver
F-13
1-2-1. Preparation of replacing the halogen lamp
Procedures for preparation of replacing the halogen lamp
Step No. Do This
1
Turn OFF the main switch and then pull out the key.
2
Turn OFF the circuit breaker at the left of the machine. Lock out
the circuit breaker lever with a padlock or the like.
3
Shut off the facility power supply.
4
Wait at least 20 minutes after machine power OFF so that the
halogen lamp section located close to the working area cools
down.
5
Open the arm section cover (front and rear).
6
Open the microscope light source box storage cover.
- To open the cover, gently press the point shown below.
Press here
Microscope light source box storage cover
RIGHT SIDE
Continued in the next section.