DFD6361-Maintenance - 第69页
A-53 W heel coola nt wate r flow ra te co ntrolle r The wheel coolant wat er flow rate controller moni tors and controls the flow rate of the whee l coolant water. The minimum limit of the flow rate is programmed b y sof…

A-52
4-2-2. Flow rate sensor
Flow rate sensor
To protect the machine and workpieces during cutting, the interlocks for the
wheel and spindle coolant water are provided with the machine.
The location and structure of the spindle coolant water flow rate sensor are as
illustrated below.
[Spindle coolant water flow rate sensor (Z1- and Z2-axis)]
Spindle1axis
spindle coolant water
flow rate sensor (Z1)
Spindle 2 axis
spindle coolant water
flow rate sensor (Z2)
Checking Sensor Name Part No. Limit Setting
Flow Rate
Spindle axis
coolant water
Flow checker MOHEH058--C 1.0 L/min

A-53
Wheel coolant water flow rate controller
The wheel coolant water flow rate controller monitors and controls the flow
rate of the wheel coolant water. The minimum limit of the flow rate is
programmed by software.
- The machine incorporating the mixed-fluid nozzle does not have controllers
of C and D.
ÿ
A B C D E F
[Wheel coolant water flow rate controller]
A : Z1 axis blade cooler
B : Z1 axis shower
C:Z1axisspray
D : Z2 axis blade cooler
E : Z2 axis shower
F:Z2axisspray
Checking Sensor Name Part No. Flow Rate Check
Setting Range
wheel coolant water Wheel coolant water
flow rate controller
MOKFH13351 0.2 to 2 L/min

A-54
4-2-3. Vacuum pressure sensor
Vacuum pressure sensor
To protect the machine itself and workpieces during cutting, the machine
monitors the vacuum pressure. The readings of vacuum pressure sensor are
manipulated by the software of the machine.
The vacuum pressure sensor checks the following vacuum:
- Chuck table workpiece vacuum
- Chuck table vacuum
- Spinner table vacuum
- Upper arm vacuum
- Lower arm vacuum
In this machine, vacuum pressures are controlled digitally.
To set these pressures, use the SENSOR THRESHOLD DATA screen [screen
6.6].
Recommended set value of vacuum
The following table shows the recommended set value of workpiece vacuum.
Note that, however, the desirable set value is different from the application
used by customers.
Section Monitoring Recommended set value
Workpiece
vacuum
Workpiece vacuum
pressure
-66.7 to -73.3kPa