DFD6361-Maintenance - 第691页
F-121 Procedur es for c ompleti on of UV i rradiati on lamp re placeme nt (Conti nued) Step No. Do This 2 Reinstall the irradia tion shield plate to its orig inal position. 3 Reinstall the inspec tion plate to its origin…
F-120
5-3-4. Completion of UV irradiation lamp replacement
Procedures for completion of UV irradiation lamp replacement
Step No. Do This
(Continued from the previous section)
1
Reinstall the glass plate to its original position.
1) Align the U-shape notches located at the back corners of the
glass plate with the pen cylinders in the back.
Pen cylinder
2) Align the U-shape notches located at the front corners of the
glass plate with the front pen cylinders.
Pen cylinder
F-121
Procedures for completion of UV irradiation lamp replacement (Continued)
Step No. Do This
2
Reinstall the irradiation shield plate to its original position.
3
Reinstall the inspection plate to its original position.
4
Close the inspection cover.
5
Close the cassette stage.
6
Tighten the retaining screw on the cassette stage.
7
Turn ON the facility power source.
8
Open the circuit breaker lockout and turn ON the breaker.
9
Insert the key into the main switch and turn ON the main switch.
F-122
5-4. Replacing the Controller for the Wheel Coolant
Water Flow Rate
Operation flow
The procedure for replacing the controller for the wheel coolant water flow
rate consists of the following steps.
5-4-1 Removing the machine outer cover
5-4-2 Disconnecting piping and wiring
5-4-3 Replacing the controller for the wheel coolant water flow rate
Safety items for replacing the controller for the wheel coolant water flow rate
WARNING
- If you perform the procedures set forth in this section while the
machine or the floor gets wet with water, you may receive an
electric shock that could result in serious injury or death.
When you connect piping of the controller for the wheel coolant
water flow rate, use seal tape or so in order to prevent water
leakage.
- After replacement of the controller for the wheel coolant water flow
rate, turn ON the wheel coolant water supply to make sure there is
no water leakage. If you use the machine while the machine or the
floor gets wet with water, you may receive an electric shock that
could result in serious injury or death.
If you find water leakage, shut down the facility power first. And
then connect the piping properly.
CAUTION
When you perform maintenance with the outer cover removed,
observe the following precaution. If you stand the removed outer
cover against the machine, you may receive injury by the cover if it is
toppled by the earthquake or like that.
After taking off the outer cover for maintenance purposes, store it
sufficiently away from the working area.