DFD6361-Maintenance - 第701页

G-1 G. DATA SHEET Summary of thi s chapt er This chapter shows measurement data of this machine . Section No. Titl e Contents 1 Noise Leve l - Noise level of this machine 2 Materi al Safet y Data Sheet ( MSDS) - Material…

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F-130
5-5. Replacing the Circuit Board of Electrical System
due to Battery Life End
About replacement of the circuit board of electrical system
Replacement of the circuit board of electrical system must be carried out by
Disco Service engineers.
When it becomes necessary to replace the circuit board due to the end of its
battery life, contact your nearest Disco Service office.
G-1
G. DATA SHEET
Summary of this chapter
This chapter shows measurement data of this machine.
Section No. Title Contents
1 Noise Level - Noise level of this machine
2 Material Safety Data
Sheet (MSDS)
- Material safety data sheet of
grease
G-2
1. Noise Level
Noise level [Reference data of DFD6360]
The measurement data of the noise level for DFD6360 machine is as follows:
Item No. Description
Adopted standard SEMI S2-0200 Sect.27
Measuring instrument RION NA-20
Machine operation mode at
the time of testing
Full auto mode
Calibration data 0 dB(A)
Noise level (Background) 44 dB(A)
Measurement points 1 meter away from the machine and
1.5 meter high from the floor
(See the drawing below.)
Layout Drawing
A
B
C
D
Measurement
Point
Noise Level of
Sound Source dB(A)
Impact Noise Level of
Sound Source dB(C)
A58 63
B60 65
C63 63
D68 69
Note: The above values are the measurement data using the standard
specification machine. If any special accessory or specification is
installed, there is a case where the value is different.