DFD6361-Maintenance - 第702页
G-2 1. Noise Level Noise lev el [Refere nce data o f DFD6360] The measurement data o f the noise level for DFD6360 machine i s as follows: Item No. Description Adopted standard SEMI S2-0200 Sect.27 Measuring instrument R…
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G. DATA SHEET
Summary of this chapter
This chapter shows measurement data of this machine.
Section No. Title Contents
1 Noise Level - Noise level of this machine
2 Material Safety Data
Sheet (MSDS)
- Material safety data sheet of
grease
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1. Noise Level
Noise level [Reference data of DFD6360]
The measurement data of the noise level for DFD6360 machine is as follows:
Item No. Description
Adopted standard SEMI S2-0200 Sect.27
Measuring instrument RION NA-20
Machine operation mode at
the time of testing
Full auto mode
Calibration data 0 dB(A)
Noise level (Background) 44 dB(A)
Measurement points 1 meter away from the machine and
1.5 meter high from the floor
(See the drawing below.)
Layout Drawing
A
B
C
D
Measurement
Point
Noise Level of
Sound Source dB(A)
Impact Noise Level of
Sound Source dB(C)
A58 63
B60 65
C63 63
D68 69
Note: The above values are the measurement data using the standard
specification machine. If any special accessory or specification is
installed, there is a case where the value is different.
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2. Material Safety Data Sheet (MSDS)
Material Safety Data Sheet (MSDS) - Grease-
The Material Safety Data Sheet for the grease used to grease up the axes is
shown here.