DFD6361-Maintenance - 第703页
G-3 2. Material Safety Data Sheet (MSDS) Material Safety Data S heet (MSD S) - Grease - The Materi al Safet y Data S heet for the grease us ed t o grease up the ax es is shown here.
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1. Noise Level
Noise level [Reference data of DFD6360]
The measurement data of the noise level for DFD6360 machine is as follows:
Item No. Description
Adopted standard SEMI S2-0200 Sect.27
Measuring instrument RION NA-20
Machine operation mode at
the time of testing
Full auto mode
Calibration data 0 dB(A)
Noise level (Background) 44 dB(A)
Measurement points 1 meter away from the machine and
1.5 meter high from the floor
(See the drawing below.)
Layout Drawing
A
B
C
D
Measurement
Point
Noise Level of
Sound Source dB(A)
Impact Noise Level of
Sound Source dB(C)
A58 63
B60 65
C63 63
D68 69
Note: The above values are the measurement data using the standard
specification machine. If any special accessory or specification is
installed, there is a case where the value is different.
G-3
2. Material Safety Data Sheet (MSDS)
Material Safety Data Sheet (MSDS) - Grease-
The Material Safety Data Sheet for the grease used to grease up the axes is
shown here.
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G-4
No. 1030-T06991
MATERIAL SAFETY DATA SHEET
SECTION 1. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION
PRODUCT NAME. THK AFC Grease
PRODUCT TYPE. Lubricating grease
DATA PREPARED. Apr 10, 2001
SECTION 2. COMPOSITION / INFORMATION ON INGREDIENTS
MIXTURE. Base oil, thickener and additives
INGREDIENTS AND COMPONENTS(% by mass)
Synthetic lubricants approx. 80
Urea thickener approx. 10
Additives(Rust-preventives, EP agent, etc) approx. 10
UN CLASS AND UN NUMBER.
SECTION 3. HAZARDS IDENTIFICATION
CLASS NAME OF HAZARDOUS CHEMICALS FOR SDS IN JAPAN. Not Applicable.
SECTION 4. FIRST AID MEASURES
EYE CONTACT. Gently rinse the affected eyes with clean water for at least 15 minutes and consult
an ophthalmologist.
SKIN CONTACT. Wash the affected area under running water using a mild soap.
INHALATION. Remove the victim from the contamination immediately to fresh air.
Call a physician if symptom persists.
INGESTION. Do not induce vomiting. Call a physician.
SECTION 5. FIRE FIGHTING MEASURES
EXTINGUISH MEDIA. Dry chemical, Foam, Carbon Dioxide.
FIRE FIGHTING PROCEDURE. Fire-fighters should wear self-contained breathing apparatus with
full face piece operated in positive pressure mode.
SECTION 6. ACCIDENTAL RELEASE MEASURES
Shut off all sources of ignition. Absorb spill with inert materials (e.g., dry sand or earth), then place in a
chemical waste container with covers for disposal, using nonsparking tools.
SECTION 7. HANDLING AND STORAGE
HANDLING. Avoid direct contact with skin or eyes.
Use in the well-ventilated areas.
STORAGE. Should be kept tightly sealed and stored in doors out of direct sunlight.
Keep away from sources of heat, open flames and sparks.
Avoid long storage periods since the product degrades with age.
SECTION 8. EXPOSURE CONTROL / PERSONAL PROTECTION
EXPOSURE.
ENGINEERING MEASURES. Do not use in areas without adequate ventilation.
EYE PROTECTION. Wear protective eyeglasses or chemical safety goggles
if oil mist generated.
HAND, SKIN AND BODY PROTECTION. When prolonged or frequently repeated contact could
occur, use protective clothing such as butyl rubber,
impervious to this material.