DFD6361-Maintenance - 第709页
Index-1 INDEX A ÿ ÿ ÿ ÿ ADJUS TMENT OPERA TIO N ................................................ B-1 Air clean unit consu mable p art s, completion of repla cing .... F-1 1 Air clea n unit consumab le par ts, p rep arati…
Appendix-3
CHECK SHEET 2 - CONSUMABLE PARTS REPLACEMENT -
Check sheet for consumable parts replacement
Use the following form when replacing consumable parts.
*
) Decide the proper intervals for maintenance considering the machine usage
conditions and fill out here.
Interval Refer To Inspection/Maintenance Item Inspection/Maintenance Date
365-Day Intervals
F-1 Air filter
// // // // //
Halogen lamp
// // // // //
Spindle carbon brush
// // // // //
Spray tip of spinner section
// // // // //
Vacuum pad for the upper arm section
// // // // //
Vacuum pad for the lower arm section
// // // // //
Y-axis roll sheet
// // // // //
700-Day Intervals
F-2 Spindle coolant water flow rate sensor
// // // // //
Solenoid valve
// // // // //
1000-Day Intervals
F-3 Bellows
// // // // //
θ-axis waterproof cover
// // // // //
θ-axis O-ring
// // // // //
θ-axis V-ring
// // // // //
Chuck table center ring
// // // // //
Spinner table O-ring
// // // // //
1800-Day Intervals
F-4 Flowmeter
// // // // //
*
F-5 Spinner high-pressure pump consumable parts
// // // // //
Fluorescent lamp
// // // // //
UV irradiation lamp
// // // // //
Controller of the wheel coolant water
// // // // //
-
Microscope LED light
// // // // //
Hard disk drive
// // // // //
Contact your
nearest
DISCO office.
Circuit board of the electrical system
// // // // //
Index-1
INDEX
Aÿ
ÿÿ
ÿ
ADJUSTMENT OPERATION ................................................B-1
Air clean unit consumable parts, completion of replacing ....F-11
Air clean unit consumable parts, preparation of replacing .....F-6
Air clean unit consumable parts, replacing ............................F-3
Air filter, replacing .................................................................F-9
Air pressure sensor .............................................................A-51
Air pressure sensor, adjustment ........................................B-122
Air pressure sensor, adjustment operation ........................B-123
Air pressure sensor, checking operation ...........................B-125
Alignment-related errors, remedies.....................................D-106
Amplifier of blade breakage detector, adjusting .............E-23, 29
Axis arrangement ..................................................................A-9
Axis operation check .......................................................... C-22
Axis section ..........................................................................A-7
Axis sensor check .............................................................. C-38
Axis-related error remedies ...............................................D-133
Bÿ
ÿÿ
ÿ
Bellows, completion of replacing .........................................F-73
Bellows, preparation of replacing ........................................F-69
Bellows, replacing .........................................................F-68, 70
Blade breakage detector sensor cleaning, completion..........E-30
Blade breakage detector sensor, cleaning .....................E-17, 20
Blade breakage detector, removing .....................................E-18
Blade/setup-related errors, remedies ................................. D-50
Cÿ
ÿÿ
ÿ
Carbon brush assembly, replacing ......................................F-25
Central part of the Y-axis, cleaning .....................................E-120
CHANGE FRAME SIZE screen [6.1], calling up ..................B-91
Changing the frame size ...................................................B-108
Chuck table center ring, replacing .......................................F-86
Chuck table replacement ......................................................B-2
Chuck table, mounting ..........................................................B-7
Chuck table, removing (for replacing waterproof cover/
O-ring/V-ring for theta-axis) ..............................................F-75
Chuck table, removing............................................................B-4
Chuck table, replacing (for conditioning) .............................C-11
Circuit board of electrical system due to
battery life end, replacing.................................................F-130
Clean air
sensor .......................................................................A-56
Cleaning the spindle main body ..........................................E-37
Completion of spindle cleaning ...........................................E-38
Completion of the frame size change ................................B-110
Conditioning executing ......................................................... C-9
Conditioning, completion .................................................... C-21
Conditioning, executing ...................................................... C-15
Conditioning, movement ...................................................... C-6
Consumable parts replacement (Check sheet 2) ....... Appendix-3
CONSUMABLE PARTS REPLACEMENT .............................F-1
Consumable parts, replacing
(spinner high-pressure pump)..........................................F-106
Consumables to be replaced at 1000-day intervals .............F-67
Consumables to be replaced at 1800-day intervals .............F-90
Consumables to be replaced at 365-day intervals .................F-2
Consumables to be replaced at 700-day intervals ...............F-52
Consumables whose replacement intervals differ
depending on the machine use conditions .......................F-97
Controller for the wheel coolant water
flow rate, replacing..................................................F-122, 128
Customizing setting ........................................................... C-42
Cutting room, cleaning ........................................................E-45
Dÿ
ÿÿ
ÿ
DATA SHEET ........................................................................G-1
DAYS SET, changing (for maintenance scheduler) .............C-69
Deionized water
sensor .......................................................................A-56
Detection function ...............................................................A-45
Device Data Maintenance ...................................................C-50
Device data, changing values...............................................C-57
Device data, deleting............................................................C-51
Device data, moving.............................................................C-52
Directories, deleting..............................................................C-54
Directories, renaming...........................................................C-56
Eÿ
ÿÿ
ÿ
Elevator axis, completion of greasing .................................E-59
Elevator axis, greasing .................................................E-53, 57
Elevator axis, preparation of greasing .................................E-55
Elevator section ..................................................................A-23
EMO switch problems .........................................................D-11
End face accuracy, checking ..............................................C-19
ENGINEERING MAINTENANCE OPERATIONS....................C-1
ENGINEERING MAINTENANCE screen [7.0], calling up.......C-3
Error code classification ......................................................D-13
Error code list .....................................................................D-14
Errors requiring emergent stop, remedies.............................D-21
Fÿ
ÿÿ
ÿ
Flange
replacement..................................................................B-9
Flange (1.2 kW spindle)
mounting.....................................................................B-18
removing.....................................................................B-14
Flange (1.8 kW spindle)
mounting.....................................................................B-45
removing.....................................................................B-41
Flange (2.2 kW spindle)
mounting.....................................................................B-71
removing.....................................................................B-67
FLANGE DRESSING screen data, verifying .......................C-12
Flange Replacement
1.2 kW Spindle............................................................B-11
1.8 kW Spindle............................................................B-38
2.2 kW Spindle ..........................................................B-64
Flange, conditioning .........................................................C-5, 7
Flange, conditioning ...........................................................E-51
Flow rate sensor .................................................................A-52
Flow rate sensor, completion of replacing ...........................F-58
Flow rate sensor, replacing .................................................F-56
Flowmeter, completion of replacing .....................................F-95
Flowmeter, replacing .................................................... F-91, 94
Fluorescent lamp and glow lamp,
completion of replacing .................................................. F-113
Fluorescent lamp, preparation of replacing ....................... F-110
Fluorescent lamp, replacing .......................................F-109, 112
Frame centering axis, completion of greasing .....................E-66
Frame centering axis, greasing ...........................................E-60
Frame centering axis, preparation of greasing ....................E-62
Frame clamp size, changing .............................................B-100
Frame size change, completion ........................................B-102
Frame size, changing .........................................................B-90
Front and rear edge of the Y-axis, cleaning ........................E-122
Index-2
INDEX
Hÿ
ÿÿ
ÿ
Halogen lamp, preparation of replacing ...............................F-13
Halogen lamp, replacing ...............................................F-12, 14
Hard disk drive,replacing......................................................F-96
Hub mount
replacement..................................................................B-9
Hub mount (1.2 kW Spindle)
mounting.....................................................................B-31
removing.....................................................................B-27
Hub mount (1.8 kW spindle)
mounting.....................................................................B-58
removing.....................................................................B-54
Hub mount (2.2 kW spindle)
mounting.....................................................................B-84
removing.....................................................................B-80
Hub Mount Replacement
1.2 kW Spindle............................................................B-24
1.8 kW Spindle............................................................B-51
2.2 kW Spindle............................................................B-77
Hub mount, conditioning .........................................C-5, 8, E-52
Iÿ
ÿÿ
ÿ
I/O check ........................................................................... C-28
Initial setting ......................................................................B-113
Inspection plate, removing..................................................B-105
Kÿ
ÿÿ
ÿ
Kerf check-related errors, remedies....................................D-121
Lÿ
ÿÿ
ÿ
LAST MENT DATE,
updating (for maintenance scheduler) ............................. C-68
Left-hand X-axis and its periphery, cleaning ........................E-85
Linear guide (frame centering guide axis), greasing ............E-64
Lock cylinder .................................................................A-47, 48
Lock cylinder of the arm section cover ................................A-48
Lock cylinder of the splash cover ........................................A-47
Lower arm axis, completion of greasing ............................E-112
Lower arm axis, greasing ..........................................E-105, 109
Lower arm axis, preparation of greasing ...........................E-108
Lower arm size, changing ...................................................B-93
Mÿ
ÿÿ
ÿ
MACHINE COMPONENTS AND FUNCTIONS.......................A-1
Machine outer cover .............................................................A-2
Machine outer cover, removing .......................F-54, 61, 92, 124
Machine protection .............................................................A-49
Main body section ...............................................................A-38
Main circuit breaker problems .............................................. D-3
Main power supply problems ............................................... D-4
Maintenance and inspection
after turning ON the power..........................................E-43
before turning ON the power .......................................E-42
Maintenance and inspection to be done every day ...............E-41
Maintenance and periodic inspection
(Check sheet 1)...................................................... Appendix-1
MAINTENANCE AND PERIODIC INSPECTION.....................E-1
Maintenance ITEM, changing
(for maintenance scheduler) ........................................... C-70
Maintenance ITEM, deleting
(for maintenance scheduler) ........................................... C-71
Maintenance scheduler ...................................................... C-64
MAINTENANCE SCHEDULER screen, calling up ............... C-65
Maintenance to be performed at 183-day intervals .............E-52
Maintenance to be performed at 30-day intervals ...............E-51
Maintenance to be performed at 365-day intervals .............E-75
Maintenance to be performed at 7-day intervals .................E-44
Maintenance whose interval differs depending on
the machine use conditions of the device ..........................E-3
Maker data .........................................................................C-72
Material safety data sheet (msds)...........................................G-3
Microscope LED light, replacing...........................................F-16
Microscope light source problems .......................................D-10
Microscope section .............................................................A-32
Mist separator element, replacing .........................................F-7
Monitor value of clean air pressure, setting ........................B-128
Monitor value of deionized water pressure, setting.............B-131
Monitor value of vacuum pressure, setting.........................B-134
Nÿ
ÿÿ
ÿ
NCS SENSOR CLEANING screen [4.8], calling up................E-6
Noise level ............................................................................G-2
Non-Contact setup amplifier, adjusting ................................E-12
Non-contact setup sensor, cleaning ......................................E-4
Non-Contact setup sensor, cleaning .....................................E-8
Non-Contact setup sensor, cleaning with abrasives..............E-10
Non-Contact setup sensor, completion of cleaning .............E-16
Oÿ
ÿÿ
ÿ
O-ring, replacing (for spinner table) ....................................F-89
Other errors, remedies.......................................................D-144
Outer cover (Spinner high-pressure pump), removing ....... F-101
Pÿ
ÿÿ
ÿ
Pad of the lower arm section, replacing ..............................F-40
Pad of the upper arm section, replacing ..............................F-37
Partition (left), removing ......................................................E-27
Personnel protection ...........................................................A-46
Piping, disconnecting ........................................................ F-126
Possible problems of the spindle due to stains ...................E-38
POWER lamp (power-on lamp) problems .............................D-6
Pre-alignment section .........................................................A-28
Pressure sensor ...............................................................B-112
Pressure setting ............................................................... B-117
Problems at power ON (problems invoking
no error code indication), remedies ...................................D-2
Problems invoking error code indication, remedies .............D-12
Push-pull axis, completion of greasing ................................E-96
Push-pull axis, greasing ................................................E-89, 95
Push-pull axis, preparation of greasing ...............................E-92
Rÿ
ÿÿ
ÿ
Removing the blade and flange/hub mount
cleaning the spindle ..................................................E-34
Removing the frame clump (for replacing the waterproof
cover/O-ring/O-ring of theta-axis) ....................................F-76
Removing the wheel cover
cleaning the spindle ..................................................E-35
Right-hand X-axis and its periphery, cleaning .....................E-83
Sÿ
ÿÿ
ÿ
Safety switch ................................................................A-47, 48
Safety switch of the arm section cover ................................A-48
Safety switch of the splash cover ........................................A-47
SECS/GEM setup ...............................................................C-73
Sensor adjustment .............................................................B-111
Sensor check ......................................................................C-27