DFD6361-Maintenance - 第73页
B-1 B. ADJUST MENT OPERATION Cont ents of t his ch apter This chapter describes the adjustment ope ration required for the machine such as replacement ope ration (including change of specifications) and s ensor adjustmen…
A-56
4-2-4. Sensor for clean air and deionized water
Pressure sensor for clean air and deionized water
In this machine, the supply pressures of clean air and deionized water are
controlled digitally.
To set these pressures, use the SENSOR THRESHOLD DATA screen [screen
6.6].
Recommended setting value of pressures
The table below shows the recommended setting values. The values vary
according to the application used.
Location Monitoring Recommended setting
value
Positive/
Negative
pressure
Clean air Clean air pressure 0.2MPa Positive
Deionized water Deionized water
pressure
0.15MPa Positive
B-1
B. ADJUSTMENT OPERATION
Contents of this chapter
This chapter describes the adjustment operation required for the machine such
as replacement operation (including change of specifications) and sensor
adjustment operation.
Section No. Title Contents
1 Chuck Table Replacement - Chuck table replacement
2 Flange/Hub Mount
Replacement
- Flange replacement
- Hub mount replacement
3 Changing the Frame Size - Changing the size of chuck table
frame clamp
- Changing the size of spinner
table size
- Changing the pad position of the
transport section
- Changing the UV irradiation
shield plate [Optional accessory]
4 Sensor Adjustment - How to adjust the pressure
sensor
5 Adjusting Utilities for
Spinner Atomizing
Nozzle
- How to adjust clean air pressure
for spinner atomizing nozzle
- How to adjust flow rate of
cleaning water for spinner
atomizing nozzle
B-2
1. Chuck Table Replacement
Safety precautions for chuck table replacement
When the size of the workpiece or frame is changed, it is necessary to replace
the chuck table.
WARNING
Since chuck table replacement is to be made with your hands placed
in an axis operation section, your hands or fingers could be caught or
cut off. Be sure that no other person touches the machine during
chuck table replacement.
While you don't use the touch panel, press the button
located at the upper left of the screen in order to lock up and
deactivate the touch panel.
CAUTION
- If a scratched chuck table is set in position, the chuck table flatness
precision will be adversely affected. Before installing the chuck
table, make sure that the table base and chuck table surface are
not scratched.
- If the table setup procedure is performed with a wrong chuck table
size, the surface of the chuck table may be damaged. After chuck
table replacement, set the chuck table size of the setup data.
- If the chuck table is replaced without executing setup, the cutting-
induced blade wear amount accumulated since last setup is not
subtracted from the actual blade tip protrusion amount data, thereby
incurring work breakage during a subsequent cutting operation.
Before chuck table replacement, be sure to perform setup
operation.
NOTICE
Neither safety goggles, protective gloves, stepstools, flashlights nor
alcohol, all of which are necessary for maintenance work, are not
supplied with the machine. Use what are furnished in your factory or
what comply with your factory's standards.