DFD6361-Maintenance - 第8页
Contents-2 CONTENTS 4-2-3. V acuum press ure sensor ...................................................................... A-54 ÿ 4-2-4. Sensor for clean air and dei onized water .........................................…
Contents-1
CONTENTS
READ CAREFULLY BEFORE USING THIS MANUAL
INTRODUCTION................................................Intro-1
CONTENTS.................................................Contents-1
A. MACHINE COMPONENTS AND
FUNCTIONS.......................................................A-1
1. Machine Outer Cover............................................................................. A-2ÿ
2. Axis Section............................................................................................ A-7ÿ
2-1. AxisArrangement.............................................................................................A-9ÿ
2-2. X-axis Section ................................................................................................ A-11ÿ
2-3. Y (Y1 and Y2)-axis Section.............................................................................A-13ÿ
2-4. Z (Z1 and Z2)-axis Section.............................................................................A-16ÿ
2-5. θ-axis Section.................................................................................................A-18ÿ
2-6. Spinner Section..............................................................................................A-21ÿ
2-7. Elevator Section.............................................................................................A-23ÿ
2-8. Pre-alignment Section....................................................................................A-28ÿ
2-9. Transport Section...........................................................................................A-30ÿ
2-10. Microscope Section......................................................................................A-32ÿ
2-11. Spindle-axis Section .....................................................................................A-35ÿ
3. Main Body Section ............................................................................... A-38ÿ
4. Detection Function ............................................................................... A-45ÿ
4-1. Personnel Protection......................................................................................A-46ÿ
4-1-1. Safety switch/lock cylinder of the splash cover.....................................A-47ÿ
4-1-2. Safety switch/lock cylinder of the arm section cover.............................A-48ÿ
4-2. Machine Protection.........................................................................................A-49ÿ
4-2-1. Air pressure sensor...............................................................................A-51ÿ
4-2-2. Flow rate sensor ...................................................................................A-52ÿ
Contents-2
CONTENTS
4-2-3. Vacuum pressure sensor ......................................................................A-54ÿ
4-2-4. Sensor for clean air and deionized water..............................................A-56ÿ
B. ADJUSTMENT OPERATION..............................B-1
1. Chuck Table Replacement...................................................................... B-2ÿ
1-1. Removing the chuck table................................................................................B-4ÿ
1-2. Mounting the chuck table..................................................................................B-7ÿ
2. Flange/Hub Mount Replacement............................................................ B-9ÿ
2-1. Flange Replacement (1.2 kW Spindle)........................................................... B-11ÿ
2-1-1. Removing the flange (1.2 kW spindle)..................................................B-14ÿ
2-1-2. Mounting the flange (1.2 kW spindle)....................................................B-18ÿ
2-2. Hub Mount Replacement (1.2 kW Spindle).....................................................B-24ÿ
2-2-1. Removing the hub mount (1.2 kW spindle)...........................................B-27ÿ
2-2-2. Mounting the hub mount (1.2 kW spindle) ............................................B-31ÿ
2-3. Flange Replacement (1.8 kW Spindle)...........................................................B-38ÿ
2-3-1. Removing the flange (1.8 kW spindle)..................................................B-41ÿ
2-3-2. Mounting the flange (1.8 kW spindle)....................................................B-45ÿ
2-4. Hub Mount Replacement (1.8 kW Spindle).....................................................B-51ÿ
2-4-1. Removing the hub mount (1.8 kW spindle)...........................................B-54ÿ
2-4-2. Mounting the hub mount (1.8 kW spindle) ............................................B-58ÿ
2-5. Flange Replacement (2.2 kW Spindle)...........................................................B-64ÿ
2-5-1. Removing the flange (2.2 kW spindle)..................................................B-67ÿ
2-5-2. Mounting the flange (2.2 kW spindle)....................................................B-71ÿ
2-6. Hub Mount Replacement (2.2 kW Spindle).....................................................B-77ÿ
2-6-1. Removing the hub mount (2.2 kW spindle)...........................................B-80ÿ
2-6-2. Mounting the hub mount (2.2 kW spindle) ............................................B-84ÿ
3. Changing the Frame Size..................................................................... B-90ÿ
3-1. Calling up the CHANGE FRAME SIZE Screen [Screen 6.1]..........................B-91ÿ
3-2. Changing the Lower Arm Size........................................................................B-93ÿ
3-3. Changing the Upper Arm Size........................................................................B-95ÿ
3-4. Replacing the Spinner Table...........................................................................B-96ÿ
3-4-1. Removing the spinner table ..................................................................B-97ÿ
3-4-2. Mounting the spinner table....................................................................B-99ÿ
3-5. Changing the Frame Clamp Size .................................................................B-100ÿ
3-6. Completion of Frame Size Change ..............................................................B-102ÿ
Contents-3
CONTENTS
3-7. Changing the UV Irradiation Unit Frame Size [OptionalAccessory].............B-103ÿ
3-7-1. Shutting off power...............................................................................B-104ÿ
3-7-2. Removing the inspection plate............................................................B-105ÿ
3-7-3. Changing the frame size.....................................................................B-108ÿ
3-7-4. Completion of the frame size change.................................................. B-110ÿ
4. Sensor Adjustment..............................................................................B-111ÿ
4-1. Pressure Sensor........................................................................................... B-112ÿ
4-1-1. Initial setting........................................................................................ B-113ÿ
4-1-2. Pressure setting.................................................................................. B-117ÿ
4-1-3. Zero clearance....................................................................................B-121ÿ
4-2. Air Pressure Sensor Adjustment...................................................................B-122ÿ
4-2-1. Adjusting the air pressure sensor........................................................B-123ÿ
4-2-2. Checking operation of the air pressure sensor....................................B-125ÿ
4-3. Setting a Monitor Value of Clean Air Pressure..............................................B-128ÿ
4-4. Setting a Monitor Value of Deionized Water Pressure..................................B-131ÿ
4-5. Setting a Monitor Value of Vacuum Pressure ...............................................B-134ÿ
5. Adjusting Utilities for Spinner Atomizing Nozzle
[OptionalAccessory]............................................................................B-137
ÿ
C. ENGINEERING MAINTENANCE
OPERATIONS.....................................................C-1
1. Calling up ENGINEERING MAINTENANCE Screen [Screen 7.0] ..........C-3ÿ
2. Hub Mount/Flange Conditioning............................................................. C-5ÿ
2-1. Movement in Conditioning................................................................................C-6ÿ
2-1-1. Flange conditioning.................................................................................C-7ÿ
2-1-2. Hub mount conditioning..........................................................................C-8ÿ
2-2. Executing Conditioning.....................................................................................C-9ÿ
2-2-1. Replacing the chuck table.....................................................................C-11ÿ
2-2-2. Verifying FLANGE DRESSING screen data..........................................C-12ÿ
2-2-3. Executing conditioning..........................................................................C-15ÿ
2-2-4. Checking the end face accuracy...........................................................C-19ÿ
2-2-5. Completion of conditioning....................................................................C-21ÿ
3. Axis Operation Check........................................................................... C-22ÿ