ACT - Accuracy Check Tool - 第200页

ACT with SSW 7xx / User Manual 07/2017 Edition 92 6.1 ACT at TX micron 1 5 µm 6.1.1 Requirements Accuracy class 15 μ m is only off ered under certain condi tions: ● Vacuum tooling ● Lifting table st abilizer ● Y- fiducia…

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This results in the following procedure:
1. Vacuum tooling is installed.
2. ACT measurement with offset correction for 20 µm on Lane1 with Gantry 1 and 2 in
Alternating placement mode on "Micron ACT Plate 100 x 250 mm".
3. ACT measurement with offset correction for 20 µm on Lane2 with Gantry 1 and 2 in
Alternating placement mode on "Micron ACT Plate 100 x 250 mm".
4. Accepting the offset values of these measurements.
5. ACT measurement 15 µm on Lane 1 with Gantry 1 on "Micron ACT Plate 100 x 250 mm“
with vacuum tooling in I-Placement placement mode.
6. ACT measurement 5 µm on Lane 2 with Gantry 2 on "Micron ACT Plate 100 x 250 mm“
with vacuum tooling in I-Placement placement mode.
Working with ACT, see section 4.2.7 and section 4.2.8.
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6.1 ACT at TX micron 15 µm
6.1.1 Requirements
Accuracy class 15 μm is only offered under certain conditions:
● Vacuum tooling
● Lifting table stabilizer
● Y-fiducial bar
● Only in the range of 250 x 100 mm
● Only in I-Placement placement mode (Gantry 1 places on Lane 1, Gantry 2 places on Lane 2)
Therefore, these criteria must also be met for the measurements with the "Accuracy Test Device
ACT 15 μm".
The detection of accuracy 15 μm / 3 S can only be carried out with the toolkit described below.
Further prerequisites
● "warm machine" => at least 2 h with position control
● A complete calibration has been performed no longer than 3 months ago
● Maintenance of heads and machine has been performed no longer than 3 months ago
● Steps 1-4 of the automatic calibration have been performed currently.
Figure 6-1: Calibration steps
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6.1.2 Contents "Accuracy Test Device 15 µm" (Item No. 03159543-01)
Item description Item number Number
ACT package TX2i micron 15 03156157-01 1 x
ACT Test dummy 250 x 100 x 3 03156158-01 1 x
VacTool ACT SP1 cpl. 03156327-01 1 x
VacTool ACT SP2 cpl. 03156332-01 1 x
ACT Plate TX micron 03146927-01 1 x
Cover for ACT Plate TX micron 03156166-01 1 x
Ceram Pads 2x2mm on tapes 00359505-02 1 reel
Thermof. Revalpha
3195 V - 0,038 mm 230 x 95
03157505-01 50 x
Nozzle type 4204/6204 cpl. ceramic 03149000-xx 20 x
Nozzle magazine type 40xx 03101503-01 1 x
Nozzle 2204 cpl. cerami 03153518-xx 12 x
Nozzle magazine type 20xx 03066107-02 1 x
UM ACT withSSW 7xx 00198363-01 1 x
Case for ACT 1 x
Table 6-2: Contents of toolkit ACT 15 µm