松下NPM-D3^D3A操作说明书 - 第18页
NPM- D3 EJM6DC-CT-01O-01 S-18 8 APC ( ) -1 -1-1 -1-2 APC -2 -2-1 -2-2 -2-3
NPM-D3 EJM6DC-CT-01O-01
S-17
7
-1
-1-1
-1-2
-1-3
-1-4
-1-5
-1-6
-2
-2-1
-2-2
-2-3
-2-4
-2-5
-2-6
-2-7
-2-8
( )
-2-9
-2-10
-2-11
-2-12
-2-13
( )
-2-14
-3
-3-1
XY XY
-3-2
-3-3
XY/Z
-3-4
-3-5
-3-6
-3-7
-3-8
( )
-3-9
-3-10
( )
-3-11
( )
-3-12
( )
-3-13
4 ( )
-3-14
( )
-3-15
-3-16
-3-17
-3-18
-3-19
-3-20
NPM-D3 EJM6DC-CT-01O-01
S-18
8
APC
( )
-1
-1-1
-1-2
APC
-2
-2-1
-2-2
-2-3
NPM-D3 EJM6DC-CT-01O-01
S-19
9
-1
-1-1
-1-2
-1-3
-1-4
-1-5
-1-6
-1-7
-1-8
-1-9
-1-10
-1-11
03015R ( )
-1-12
0.025 mm ( )