松下NPM-D3^D3A操作说明书 - 第404页

NPM- D3 EJM6DC-MB-06O-01 6-1-15 -1 A A 1 ( ) 6 - 1 - 1 5 D H B C ( ) E F B C G I J M L K D ( ) E ( ) F ( ) 1 2 ( ) 2

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NPM-D3 EJM6DC-MB-06O-01
6-1-14
-2
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-1
A
A
1
( )
6-1-15
D
H
B
C
(
)
E F
BC G I J
M L K
D
( )
E
( )
F
( )
1 2
( )
2
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-2
I
(s)
J
(mm)
K
L
(mm)
M
G
H
100%
80%
60%
40%
20%
0.001 mm 30.0 mm