松下NPM-D3^D3A操作说明书 - 第405页
NPM- D3 EJM6DC-MB-06O-01 6-1-15 -2 I (s) J (mm) K L (mm) M G H 100% 80% 60% 40% 20% 0.001 mm 30.0 mm
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-1
A
A
1
( )
6-1-15
D
H
B
C
(
)
E F
BC G I J
M L K
D
( )
E
( )
F
( )
1 2
( )
2
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-2
I
(s)
J
(mm)
K
L
(mm)
M
G
H
100%
80%
60%
40%
20%
0.001 mm 30.0 mm
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-3
A B C
E D
Z
1
2 b
1
a
d
e
2 c
A
(mm)
B
2
( 2 )
C
2
( 2 )
D
1(s)
E
2(s)
(P.6-1-15-
1
)
6-1-15
2
( )