松下NPM-D3^D3A操作说明书 - 第406页
NPM- D3 EJM6DC-MB-06O-01 6-1-15 -3 A B C E D Z 1 2 b 1 a d e 2 c A (mm) B 2 ( 2 ) C 2 ( 2 ) D 1(s) E 2(s) (P.6-1-15- 1 ) 6 - 1 - 1 5 2 ( )
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-2
I
(s)
J
(mm)
K
L
(mm)
M
G
H
100%
80%
60%
40%
20%
0.001 mm 30.0 mm
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-3
A B C
E D
Z
1
2 b
1
a
d
e
2 c
A
(mm)
B
2
( 2 )
C
2
( 2 )
D
1(s)
E
2(s)
(P.6-1-15-
1
)
6-1-15
2
( )
NPM-D3 EJM6DC-MB-06O-01
6-1-15
-4
(P.6-1-15-
1
)
A
B
A
B
No
1
C
X[mm]
X
D
Y[mm]
Y
E
A[ ]
C D E