P-0310-004(2_2) - 第15页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 103 09198209 ASSY_V AL VE 1 1091908206-003 104 221AA033 ROHS_HEX-SCT 1 M5L25 1091908206-004 105 221AA031 ROHS_HEX-SCT 1 M5L16 1091908206-005 1 1 1 212A2087 GUIDE 1 1091908…
Fig. I1-2
ノズルストッカ駆動部
Nozzle Stocker Driving Section
1007-001
113
112
112
123
123
122
122
111
124
115
128
114
129
125
121
120
130
119
116
118
126
126
117
127
127
127
136
137
135
141
146
142
142
138
139
140
145
133
142
105
104
147
133
142
145
143
133
134
144
143
148
145
133
142
103
B0920
B0918
B0922
Y0937
Fig. I1
中異形ノズルストッカ部
MIDDLE SIZE ODD-SHAPED NOZZLE SECTION
UNIT-8
Fig. I1
STOCKER
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
103 09198209 ASSY_VALVE 1 1091908206-003
104 221AA033 ROHS_HEX-SCT 1
M5L25 1091908206-004
105 221AA031 ROHS_HEX-SCT 1
M5L16 1091908206-005
111 212A2087 GUIDE 1
1091908204-001
112 216S2677 LEVER 2
1091908204-002
113 216D0463 PIN_HINGE 1
1091908204-003
114 216D0464 PIN_HINGE 1
1091908204-004
115 211F8213 BRACKET 1
1091908204-005
116 211G3505 BLOCK 1
1091908204-006
117 216D0441 PIN_HINGE 1
1091908204-007
118 216S2914 LEVER 1
1091908204-008
119 211D9825 PLATE 1
1091908204-009
120 211F9410 BRACKET 1
1091908204-010
121 09198208 ASSY_SENSOR 1
1091908204-011
122 222A0129 BUSH_BEARING 2
1091908204-012
123 222D0131 BEARING_RADIAL 2
1091908204-013
124 222D0308 BEARING_RADIAL 1
1091908204-014
125 224C0535 CYLINDER 1
1091908204-015
126 222A0151 BUSH_BEARING 2
1091908204-016
127 221KA002 ROHS_RING 4
E RING 2 1091908204-017
128 225F0261 PIPE_FITTINGS 1
1091908204-018
129 222N0019 SPRING_TENSION 1
1091908204-019
130 222M0657 SPRING_COMP 1
1091908204-020
133 221HA001 WASHER 6
SW2 1091908204-023
134 221HA101 WASHER 2
FW2 1091908204-024
135 221FA005 NUT_HEX 1
M3 1091908204-025
136 221BA004 ROHS_BOLT_HEX 1
BOLT_HEX M3L25 1091908204-026
137 221AA013 ROHS_HEX-SCT 2
M3L30 1091908204-027
138 221AA003 ROHS_HEX-SCT 2
M2.5L12 1091908204-028
139 221HA002 WASHER 2
SW2.5 1091908204-029
140 221HA102 WASHER 2
FW2.5 1091908204-030
141 221CA026 SET_SCREW 1
SET M3L3 1091908204-031
142 221HA201 WASHER 6
FWS2 1091908204-032
143 221DA003 MACHINE_SCREW 3
PAN M2L8 1091908204-033
144 221FA001 NUT_HEX 1
M2 1091908204-034
145 221AA001 ROHS_HEX-SCT 4
M2L6 1091908204-035
146 221FA003 NUT_HEX 1
M2.5 1091908204-036
147 221AA005 ROHS_HEX-SCT 2
M3L6 1091908204-037
148 221AA008 ROHS_HEX-SCT 2
M3L12 1091908204-038
Fig. I1
1104-002
Fig. I1-2
SIGMA-G5SA
SIGMA-G5SB
SIGMA-G5SC
SIGMA-G5SD
UNIT-8
Fig. I1
STOCKER
Fig. I1-3
エア配管
Air Piping
1007-001
From Main Body
Stocker Up/Down
201
See Fig. I1-2
Key No.121
See Fig. I1-2
Key No.125
Y0937
B0920
B0918
B0922
Fig. I1
中異形ノズルストッカ部
MIDDLE SIZE ODD-SHAPED NOZZLE SECTION
UNIT-8
Fig. I1
STOCKER