P-309-002e - 第297页

Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 201 0919I00K TUBE D4 1 309190800U-001 Fig. G3 0912-002 Fig. G3-3 UNIT -6 Fig. G3 ST OCKER 2 SIGMA-G4DA SIGMA-G4DB SIGMA-G4DC

Fig. G3-3

エア配管

Air Piping

0912-002

M-3ALU-4

CDUJB10-8S-F8NS

M-3ALU-4

CDUJB10-8S-F8NS

KQ2UD04-06

KQP-04

KQ2L08-01S

JNU6

From Main Body

Stocker Up/Down

AS1001F-04

See Fig. G2-3

Key No.240

See Fig. G2-2

Key No.101

Stocker Up/Down

See Fig. G3-2

Key No.101

201

UNIT-6

Fig. G3

STOCKER 2

Fig. G3

ノズルストッカ部（自動段取り用）

NOZZLE STOCKER SECTION(For Automatic Setup)

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

201 0919I00K TUBE D4 1 309190800U-001

Fig. G3

0912-002

Fig. G3-3

UNIT-6

Fig. G3

STOCKER 2

SIGMA-G4DA

SIGMA-G4DB

SIGMA-G4DC

MEMO