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SEMI E137-1104 © SEMI 2004 6  Fragile  Keep Dry  Any other m arkings as applicable (e.g. , Center of Balance, Do Not Stack, Keep Upright, Do Not Freeze) 13.2 The following text should be applied by stencil with letter…

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SEMI E137-1104 © SEMI 2004 5
10.4.3 Crates should not have exposed nails.
10.4.4 Crates should not have broken or split runners
or skids.
10.4.5 Plywood should be cut square and to fit so that
no edge of the plywood extends >1.6 mm (0.0625 in.)
over or under the panel size, as determined by the cleat
assembly.
10.4.6 The thickness of adjacent boards in a panel
should match within a maximum tolerance of 1.6 mm
(0.0625 in.).
11 Packing and Securing Procedures
11.1 All units of the SME should be adequately
blocked and braced by foam or wood, if necessary to
prevent shifting or movement during handling and
transportation.
11.1.1 SME mainframes and some miscellaneous
components may require special brackets for bracing.
11.2 All heavier items should be placed on the bottom
of the crate with lighter and/or more fragile items
placed near the top of the crate.
11.3 Crates should not be over packed.
11.4 All main SME components should be secured on
a floating base with foam material of sufficient density
to support the weight either in the deck or in the skid.
11.4.1 For SME that is deemed of lower-value and/or
as less-sensitive to handling, a nonfloating base may be
used. However, all other material requirements should
remain the same.
11.5 The foot or base of the SME should be bolted
against the crate’s base, if possible.
11.6 For land and/or air shipment, the SME should be
Wrapped with bubble pack,
Wrapped with polyethylene stretch wrap, and
Placed in a barrier bag.
11.7 For ocean shipment, the SME should be
Wrapped with bubble pack,
Wrapped with polyethylene stretch wrap,
Placed in a barrier bag with activated desiccant
distributed as evenly as possible between barrier
bag and stretch wrap at the rate of 1 g/L (1 oz/ft
3
)
with the SME volume deducted from the air
volume when calculating required amount of
desiccant, up to a maximum of 9.1 kg (320 oz), and
Vacuum sealed in the barrier bag in 5 minutes to
minimize exposure of the desiccant to open air.
11.8 Feet or levelers from any frame or SME
component should not be removed.
11.9 SME on casters (i.e., pivoting rollers) should be
blocked up, keeping the casters clear of the crate, to
prevent damage to casters and to keep them from
wearing through the crate’s base.
11.10 All support hardware or separate components
(e.g., cables, spare parts) should be packaged in
separate containers from the main unit.
12 Monitoring Device Installation Procedures
12.1 Shock indicators should be mounted on both one
end and one side on the outside of the crate at a top
corner.
12.1.1 Shock indicators should be glued to the crate
and coated with lacquer so they cannot be peeled off or
knocked off.
12.2 Additional disposable shock indicators should be
mounted on both one end and one side inside of the
crate at a top corner on the floating base, barrier bag,
packing material, or SME itself for SME more sensitive
to handling, as required.
12.2.1 If shock indicators are mounted inside of the
crate, their locations should be marked on the outside of
the crate.
12.2.2 Nondisposable shock-measurement recording
equipment may be substituted.
12.3 Tilt indicators should be mounted on both the
inside and the outside of the crate.
12.3.1 Tilt indicators on the outside should be glued to
the crate and coated with lacquer so they cannot be
peeled off or knocked off.
12.4 Disposable high-temperature and/or low-
temperature indicators should be placed inside the crate
for SME components sensitive to temperatures
potentially encountered during shipment or storage.
12.4.1 Nondisposable temperature-measurement
recording equipment may be substituted.
13 Marking and Labeling Procedures
13.1 The following markings should be applied to the
crate using vinyl labels or by stencil:
Delicate Instruments
Do Not Drop
Tilt Indicator Information
Shock Indicator Information
Temperature Indicator Information
SEMI E137-1104 © SEMI 2004 6
Fragile
Keep Dry
Any other markings as applicable (e.g., Center of
Balance, Do Not Stack, Keep Upright, Do Not
Freeze)
13.2 The following text should be applied by stencil
with lettering height of 1.3 cm (0.5 in.):
To/From information
PO number
Customer’s SME identification number, if
provided
Box ___ of ___
Tare weights
Dimensions
13.3 No markings should appear on the crate other than
information pertinent to the current shipment.
14 Packing List Procedures
14.1 The packing list should be affixed to exterior of
the crate in a weatherproof holder.
14.2 The packing list should specify what
component(s) of the SME each crate and container
holds.
15 Transportation Procedures
15.1 For shipment over land, the SME should be
transported in vehicles with air-ride suspension for all
support axles (e.g., with air-ride trailers).
15.2 The trailer should have no holes to the exterior in
the floor, walls, or roof.
15.3 Shipping containers should be secured using bars
and/or straps connected to the trailer.
15.4 If a shipping container is neither a wooden crate
nor a cardboard box (e.g., bubble pack), then
transportation provider should supply and wrap the
shipping container in clean protective covers and/or
pads.
15.4.1 The transportation provider, supplier, and
customer should keep the protective covers and/or pads
on the shipping containers during all phases of loading,
shipment, and unloading.
15.5 Shipping containers should not be stacked (i.e.,
top loaded).
16 Unloading, Unpacking, and Relocation
Procedures
16.1 The supplier should provide their requirements to
the customer for correctly unloading the SME from the
vehicle, unpacking it, and relocating it from the loading
dock/receiving area to its final location in the
cleanroom.
16.2 The supplier should work with the customer and
the movers to review and agree on their SME relocation
plan.
16.3 The crating and the monitors should be inspected
for any damage or indications of mishandling and
conditions recorded.
16.4 The outer shipping materials (e.g., crates, bubble
pack) should be carefully removed on the loading
dock/receiving area to prevent damage to the triple
wrapping.
16.5 The outer wrap should be cleaned and removed on
the loading dock/receiving area.
16.6 The middle wrap should be cleaned before the
SME, separate subassemblies, or support components
leave the loading dock/receiving area.
16.7 The SME, separate subassemblies, or support
components should be relocated to the at least ISO
Class 7 intermediate staging area.
16.8 The middle wrap should be cleaned again before
it is removed in the intermediate staging area.
16.9 The middle wrap should be carefully removed in
the intermediate staging area.
16.10 The inner wrap should be cleaned before the
SME, separate subassemblies, or support components
leave the intermediate staging area.
16.11 The SME, separate subassemblies, or support
components should be relocated to the final cleanroom
or a final staging area of the same cleanliness level as
the cleanroom.
16.12 The inner wrap should be cleaned again before it
is removed in the final cleanroom or a final staging area
of the same cleanliness level as the cleanroom.
16.13 The inner wrap should be carefully removed in
the final cleanroom or a final staging area of the same
cleanliness level as the cleanroom.
16.14 The humidity indicator should be inspected and
the reading recorded.
16.15 If the inner wrap is removed in a final staging
area, the SME, separate subassemblies, or support
components should be relocated into the final
cleanroom location for installation.
SEMI E137-1104 © SEMI 2004 7
17 Inspection Procedures
17.1 The customer should inspect external surfaces of
the SME, separate subassemblies, and/or support
components for cleanliness after removal of the inner
wrapping.
17.1.1 If the SME, separate subassemblies, or support
components fail the cleanliness inspection, supplier
should reclean the failed areas and pass a cleanliness
reinspection prior to start of installation.
17.2 The customer should provide the supplier with a
completed copy of their cleanliness inspection results.
18 Related Documents
Lin, Steve and Graves, Sarah, “Comparing The
Molecular Contamination Contribution Of Clean
Packaging Films,” Micro, October, 1998. p. 95.
http://www.micromagazine.com/archive/98/10/graves.h
tml
Nappi, John J. Jr., “A Guide to Ultra Clean Film
Packaging,” Cleanroom News, Vol. 7, No. 1, August
2003. http://www.liberty-ind.com/newsletter_0503.htm
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