semi合集-English.pdf - 第1023页

SEMI E140-0305 © SEMI 2005 9 Row #1 Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula TB19 Cost to Process Engineering, $ 2,135 =TA67 × TA34/52/40 TB20 Cost to Supervision, $ 107 =TA68 × TA35/52/40 TB21 Cost to Op…

SEMI E140-0305 © SEMI 2005 8

Row

Parameter Units Example Value

TA124 Materials Consumed for Training $ 2,000

TA125 Labor per Maintenance Event

TA126 Equipment Engineering Time Required per Maintenance Event hrs/maintenance event 8.0

TA127 Process Engineering Time Required per Maintenance Event hrs/maintenance event 1.0

TA128 Supervision Time Required per Maintenance Event hrs/maintenance event 1.0

TA129 Operator Time Required per Maintenance Event hrs/maintenance event 0.5

TA130 Maintenance Technician Time Required per Maintenance Event hrs/maintenance event 0.5

TA131 OEM Field Service Time hrs/maintenance event 8.0

TA132 OEM Field Process Time hrs/maintenance event 0.0

TA133 Equipment Requalification Costs

TA134 Equipment Engineering Time Required per Maintenance Event hrs/maintenance event 1.5

TA135 Process Engineering Time Required per Maintenance Event hrs/maintenance event 0.0

TA136 Supervision Time Required per Maintenance Event hrs/maintenance event 0.0

TA137 Operator Time Required per Maintenance Event hrs/maintenance event 0.0

TA138 Maintenance Technician Time Required per Maintenance Event hrs/maintenance event 1.5

TA139 OEM Field Service Time Required per Maintenance Event hrs/maintenance event 1.5

TA140 OEM Field Process Time Required per Maintenance Event hrs/maintenance event 0.0

TA141 Number of Test Wafers Consumed wafers/maintenance

event

1.0

TA142 Other Consumables Required to Requalify A Piece of Equipment $/maintenance event 100.00

TA143 This Section Contains Data Related to Yield

TA145 NOTE: Yield Costs are Only Those Caused by Gas Box Problems, Not Other Problems on the Piece of Equipment.

TA146 Composite Yield

TA147 Equipment Yield dimensionless 1.00

TA148 Probe Yield dimensionless 1.00

TA149 Inputs for Annualized Yield Costs

TA150 Number of Wafers Lost to Equipment Yield wafer 0.0

TA151 Number of Equivalent Wafers Lost to Defect Limited Yield wafer 0.0

TA152 Number of Equivalent Wafers Lost to Parametric Limited Yield wafer 0.0

Row numbers begin with 8 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table

number (using a lettering scheme to simplify the formulae) followed by the row in that table.

Table 2 Annualized Fixed Costs for the Input Data Listed in Table 1.

Row

Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula

TB7 Depreciation , $

14,843 14,843 14,843 14,843 14,843 14,843 14,843

=(TB9:TB16)

TB9

Gas Box

TB10 Straight Line, $ 14,143 14,143 14,143 14,143 14,143 14,143 14,143

TB11 Fixed Declining Balance, $ - - - - - - -

TB12 Double Declining Balance, $ - - - - - - -

TB13

Support Equipment

TB14 Straight Line, $ 700 700 700 700 700 700 700

TB15 Fixed Declining Balance, $ - - - - - - -

TB16 Double Declining Balance, $ - - - - - - -

TB17

System Qualification

7,816 0 0 0 0 0 0

=(TB18:TB25

)

TB18 Cost to Equipment Engineering, $ 2,135 =TA66 ×

TA33/52/40

SEMI E140-0305 © SEMI 2005 9

Row

Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula

TB19 Cost to Process Engineering, $ 2,135 =TA67 ×

TA34/52/40

TB20 Cost to Supervision, $ 107 =TA68 ×

TA35/52/40

TB21 Cost to Operations, $ 50 =TA69 × TA36

TB22 Cost to Maintenance, $ 70 =TA70 × TA37

TB23 Cost of OEM Field Service Billed

to Fab In Addition to Purchase

Price, $

1,050 =TA71 × TA38

TB24 Cost of OEM Field Process Billed

to Fab in Addition to Purchase

Price, $

270 =TA72 × TA39

TB25 Materials Consumed, $ 2,000 =TA73

TB26

Installation

12,467 0 0 0 0 0 0

=(TB27:TB33

)

TB27 Cost to Equipment Engineering, $ 10,673 =TA58 ×

TA33/52/40

TB28 Cost to Process Engineering, $ 107 =TA59 ×

TA34/52/40

TB29 Cost to Supervision, $ 107 =TA60 ×

TA35/52/40

TB30 Cost to Operations, $ 50 =TA61 × TA36

TB31 Cost to Maintenance, $ 210 =TA62 × TA37

TB32 Cost of OEM Field Service Billed

to Fab In Addition to Purchase

Price, $

1,050 =TA63 × TA38

TB33 Cost of OEM Field Process Billed

to Fab in Addition to Purchase

Price, $

270 =TA64 × TA39

TB34

Training, $

30,800 0 0 0 0 0 0

=(TB35:TB36

)

TB35 Training Time Billed by OEM, $ 28,800 =TA48 × TA49

(TA50:TA54)

TB36 Materials Consumed, $ 2,000 =TA55

TB37

Moves & Rearrangements, $

30,000 0 0 0 0 0 0 =TB38

TB38 Moves & Rearrangements, $ 30,000 =TA57

TB39

Floor Space, $

875 875 875 875 875 0 0

=(TB40:TB41

)

TB40 Gas Box, $ 625 625 625 625 625 0 0 =IF(TA16>=1,

TA17 ×

TA12,0)

TB41 Support Equipment, $ 250 250 250 250 250 0 0 =IF(TA21>=1,

TA22 ×

TA12,0)

TB43

Total Fixed Costs, $

Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7

SEMI E140-0305 © SEMI 2005 10

Row

Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula

TB44

Annual, $

96,800 15,718 15,718 15,718 15,718 14,843 14,843 For Year n,

sum the

corresponding

year’s value

from these

rows:

TB7+TB17+TB

26+TB34+TB3

7+ TB39

TB45

Cumulative, $

96,800 112,518 128,236 143,954 159,672 174,515 189,358

=(Year 1

value + Year 2

value + … +

Year n value)

Row numbers begin with 7 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table

number (using a lettering scheme to simplify the formulae) followed by the row in that table.

Depreciation formulas may be found in standard accounting textbooks.

Table 3 Annualized Recurring Costs for the Input Data Listed in Table 1.

Row

Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula

TC7

Material, $

2,079 2,141 2,206 2,272 2,340 0 0 =(TC8:TC11)

TC8 Test/Filler Wafers, $ 139 143 147 151 156 0 0 =TA79 × TA26 ×

TA31 × TA30

TC9 Utilities, $ 1,857 1,913 1,970 2,029 2,090 0 0 =(TA80 ×

TA40+TA81 ×

TA41+TA82 ×

TA42) × TA26 ×

TA31

TC10 Supplies, $ 28 29 29 30 31 0 0 =TA77 × TA43 ×

TA26 × TA31

TC11 Waste Disposal, $ 55 57 59 61 62 0 0 =TA76 × TA26 ×

TA31 × TA44

TC12

Consumables, $

960 989 1,018 1,049 1,080 0 0 =TC13

TC13

Consumables, $

960 989 1,018 1,049 1,080 0 0 =IF(TA85<TA16,T

A84/TA16 ×

ROUNDUP

((TA16-

TA85)/TA85,0),0)

TC14

Maintenance, $

37,527 38,653 39,813 41,007 42,237 0 0 =(TC15:TC19)

TC15 Labor, $ 4,717 4,859 5,005 5,155 5,309 0 0 =TA31/TA102 ×

(((TA126+TA134)

× TA33/52/40) +

((TA127+TA135) ×

TA34/52/40) +

((TA128+TA136) ×

TA35/52/40) +

((TA129+TA139) ×

TA36) +

((TA130+TA138) ×

TA37) +

((TA131+TA139) ×

TA38) +

((TA132+TA140) ×

TA39))

TC16 Spare Parts, $ 3,800 3,914 4,031 4,152 4,277 0 0 =TA112