semi合集-English.pdf - 第1026页

SEMI E140-0305 © SEMI 2005 12 Row #1 Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula TD22 Cumulative, $ 0 0 0 0 0 0 0 =  (Year 1 value = Year 2 value = … = Year n valu e) #1 Row numbers begin with 16 to align w…

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SEMI E140-0305 © SEMI 2005 11
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TC17 Repair Parts, $ 1,410 1,452 1,496 1,541 1,587 0 0 =TA31/TA102 ×
(TA113+TA114 ×
TA40+TA141 ×
TA30+TA141)
TC18 Service Contract, $ 0 0 0 0 0 0 0 =TA111
TC19 Training, $ 27,600 28,428 29,281 30,159 31,064 0 0 =(TA117 × TA118
× (TA119:TA123)
+ TA124) × TA116
TC20
Labor, $
22,869 23,555 24,262 24,990 25,739 0 0 =TC21
TC21 Operations, $ 22,869 23,555 24,262 24,990 25,739 0 0 =TA87 × TA36 ×
TA26 × TA31
TC22
Support Personnel, $
0 0 0 0 0 0 0 =(TC23:TC28)
TC23 Equipment Engineering, $ 0 0 0 0 0 0 0 =TA89 × TA26 ×
TA33
TC24 Process Engineering, $ 0 0 0 0 0 0 0 =TA90 × TA26 ×
TA34
TC25 Supervision, $ 0 0 0 0 0 0 0 =TA89 × TA26 ×
TA35
TC26 Maintenance, $ 0 0 0 0 0 0 0 =TA92 × TA37 ×
TA26 × TA31
TC27 OEM Field Service, $ 0 0 0 0 0 0 0 =TA93 × TA38 ×
TA26 × TA31
TC28 OEM Field Process, $ 0 0 0 0 0 0 0 =TA94 × TA39 ×
TA26 × TA31
TC29
Scrap, $
0 0 0 0 0 0 0 =0
(These are
accounted for in
Y$.)
TC31
Support Services, $
600 618 637 656 675 0 0 =(TC32:TC33)
TC32 ESH, $ 500 515 530 546 563 0 0 =TA96
TC33 Other, $ 100 103 106 109 113 0 0 =TA97
TC35
Total Recurring Costs, $
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7
TC36
Annual, $
64,035 65,956 67,935 69,973 72,072 0 0 =IF(TA16>=1,
(TC7 + TC12 +
TC14 + TC20 +
TC22 + TC29 +
TC31),0)
TC37
Cumulative, $
64,035 129,992 197,927 267,900 339,973 339,973 339,973 =(Year 1 value +
Year 2 value + … +
Year n value)
#1
Row numbers begin with 8 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table
number (using a lettering scheme to simplify the formulae) followed by the row in that table.
Table 4 Annualized Yield Costs for the Input Data Listed in Table 1.
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TD16 Equipment Yield, $ 0 0 0 0 0 0 0 =TA150 × TA28
TD17 Defect Limited Yield, $ 0 0 0 0 0 0 0 =TA151 × TA29
TD18 Parametric Limited Yield, $ 0 0 0 0 0 0 0 =TA152 × TA29
TD20 Total Yield Costs, $ 0 0 0 0 0 0 0
TD21 Annual, $ 0 0 0 0 0 0 0 =IF(TA16>=1,
(TD16:TD18),0)
SEMI E140-0305 © SEMI 2005 12
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TD22 Cumulative, $ 0 0 0 0 0 0 0 =(Year 1 value =
Year 2 value = …
= Year n value)
#1
Row numbers begin with 16 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table
number (using a lettering scheme to simplify the formulae) followed by the row in that table.
Table 5 COO for the Input Data Listed in Table 1.
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TE4 Fixed Costs, $ 96,800 15,718 15,718 15,718 15,718 14,843 14,843 For Year n,
=IF(TA14>=1,TB4
4 value for year n,”
Asset Fully
Depreciated”)
TE5 Recurring Costs, $ 64,035 65,956 67,935 69,973 72,072 Asset
Retired
Asset
Retired
For Year n,
=IF(TA16>=1,TC3
6 value for year n,”
Asset Retired”)
TE6 Yield Costs, $ 0 0 0 0 0 Asset
Retired
Asset
Retired
For Year n,
=IF(TA16>=1,TC3
6 value for year n,”
Asset Retired”)
TE7 Total Costs, $ 160,836 81,674 83,653 85,691 87,790 14,843 14,843 =(TE4:TE6)
TE9 Cumulative Fixed
Costs, $
96,800 112,518 128,236 143,954 159,672 174,515 189,358 =Year n value in
row TB45
TE10 Cumulative
Recurring Costs, $
64,035 129,992 197,927 267,900 339,973 339,973 339,973 =Year n value in
row TC37
TE11 Cumulative Yield
Costs, $
0 0 0 0 0 Asset
Retired
Asset
Retired
=Year n value in
row TD22
TE12 Cumulative Total
Costs, $
160,836 242,510 326,163 411,854 499,644 514,487 529,330
#3
=(TE9:TE11)
TE24 Yearly Cost,
$/wafer
0.5887 0.2990 0.3062 0.3137 0.3214 Asset
Retired
Asset
Retired
=IF(TA16>=1,TE7
/ TA16/(TA26 ×
TA31)/(TA147 ×
TA148),”Asset
Retired”)
TE26 Cumulative Cost,
$/wafer
0.5887 0.4439 0.3980 0.3769 0.3658 0.3767 0.3875
#4
=IF(TA16>=1,TE1
2/TA16/(TA26 ×
TA31)/(TA147 ×
TA148),TE12/TA1
6/TA16/(TA26 ×
TA31)/(TA147 ×
TA148))
#1
Row numbers begin with 4 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table
number (using a lettering scheme to simplify the formulae) followed by the row in that table.
#2
For the results shown in the table, Useful Life of Piece of Equipment = 5 yrs; Depreciable Life of Piece of Equipment = 7 yrs; Tool
Throughput = 33 wafers/hr = 277,200 wafers/yr; Equipment Utilization = 0.9855.
#3
Total Cost = $529,330
#4
Total COO = $0.3875/wafer. (The Cumulative Cost in the last year equals the Total COO.)
SEMI E140-0305 © SEMI 2005 13
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