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SEMI E4-0699 © SE MI 1980, 1999 20 R Device ID Device ID W ST REAM FUNCTION EB l o c k N o . Block No. S1(R=0) S2(R=0) S3(R=0) S4(R=0) S1(R=1) S2(R=1) S3(R=1) S4(R=1) Trans action T imer Figure R1-9 Stored Header Model N…

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SEMI E4-0699 © SEMI 1980, 199919
Figure R1-8
General Node Transaction Algorithm
SEMI E4-0699 © SEMI 1980, 1999 20
R Device ID
Device ID
W STREAM
FUNCTION
EBlock No.
Block No.
S1(R=0)
S2(R=0)
S3(R=0)
S4(R=0)
S1(R=1)
S2(R=1)
S3(R=1)
S4(R=1)
Transaction Timer
Figure R1-9
Stored Header Model
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Copyright by SEMI® (Semiconductor Equipment and Materials
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SEMI E5-1104 © SEMI 1982, 2004 1
SEMI E5-1104
SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE
CONTENT (SECS-II)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current changes approved by the
North American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004; to be published November 2004. Originally published in 1982; last published July 2004.
NOTICE: The user’s attention is called to the
possibility that some implementations of this standard,
particularly those related to the use of Stream 4, may
involve the use of inventions covered by U.S. patents
4,884,674 and 5,216,613, and by other patents issued or
pending, held by Texas Instruments Incorporated. By
publication of this standard, SEMI takes no position
respecting either the applicability or the validity of
these or other patent rights asserted in connection with
any item mentioned in this standard. Users of this
standard are expressly advised that determination of
any such patent rights, and the risk of infringement of
such rights, are entirely their own responsibility.
CONTENTS
1 Purpose
2 Scope
3 Limitations
4 Referenced Standards
5 Terminology
6 The Message Transfer Protocol
6.1 Intent
6.2 Messages
6.3 Blocking Requirements
6.4 Message Header
6.5 Transaction Timeout
6.6 Multiple Open Transaction
7 Streams and Functions
7.1 Streams
7.2 Functions
7.3 Stream and Function Allocation
8 Transaction and Conversation Protocols
8.1 Intent
8.2 Transaction Definition
8.3 Transaction Level Requirements
8.4 Conversation Protocols
9 Data Structures
9.1 Intent
9.2 Item
9.3 List
9.4 Localized Character String Items
9.5 Example Data Structures
9.6 Data Item Dictionary
9.7 Variable Item Dictionary
9.8 Object Dictionary
10 Message Detail
10.1 Intent
10.3 Message Usage
10.4 Stream 0 and Function 0
10.5 Stream 1 Equipment Status
10.6 Stream 2 Equipment Control and Diagnostics
10.7 Stream 3 Material Status
10.8 Stream 4 Material Control
10.9 Stream 5 Exception Handling
10.10 Stream 6 Data Collection
10.11 Stream 7 Process Program Management
10.12 Stream 8 Control Program Transfer
10.13 Stream 9 System Errors
10.14 Stream 10 Terminal Services
10.15 Stream 11 Host File Services (Deleted)
10.16 Stream 12 Wafer Mapping
10.17 Stream 13 Data Set Transfers
10.18 Stream 14 Object Services
10.19 Stream 15 Recipe Management
10.20 Stream 16 Processing Management
10.21 Stream 17 Equipment Control and Diagnostics
10.22 Stream 18 Subsystem Control and Data
11 Message Documentation
11.1 Intent
11.2 Standard Form SECS-II Document
12 Units of Measure
12.1 Intent
12.2 Units Symbol
12.3 Compliance
12.4 SECS-II Units of Measure Identifiers
Related Information 1
R1-1 The General Node Transaction Protocol
R1-2 Some Suggested Message Usage
R1-3 Notes on SECS-II Data Transfers
R1-4 Process Programs
R1-5 Suggested Baseline SECS Equipment
Implementation