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SEMI E5-1104 © SEMI 1982, 2004 1 SEMI E5-1104 SEMI EQUIPMENT COMMUNICA TIONS STANDARD 2 MESSAGE CONTENT (SECS-II) This standard was technically approved by the Globa l Informat ion & Control Committee and is the dire…
SEMI E4-0699 © SEMI 1980, 1999 20
R Device ID
Device ID
W STREAM
FUNCTION
EBlock No.
Block No.
S1(R=0)
S2(R=0)
S3(R=0)
S4(R=0)
S1(R=1)
S2(R=1)
S3(R=1)
S4(R=1)
Transaction Timer
Figure R1-9
Stored Header Model
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E5-1104 © SEMI 1982, 2004 1
SEMI E5-1104
SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE
CONTENT (SECS-II)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current changes approved by the
North American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004; to be published November 2004. Originally published in 1982; last published July 2004.
NOTICE: The user’s attention is called to the
possibility that some implementations of this standard,
particularly those related to the use of Stream 4, may
involve the use of inventions covered by U.S. patents
4,884,674 and 5,216,613, and by other patents issued or
pending, held by Texas Instruments Incorporated. By
publication of this standard, SEMI takes no position
respecting either the applicability or the validity of
these or other patent rights asserted in connection with
any item mentioned in this standard. Users of this
standard are expressly advised that determination of
any such patent rights, and the risk of infringement of
such rights, are entirely their own responsibility.
CONTENTS
1 Purpose
2 Scope
3 Limitations
4 Referenced Standards
5 Terminology
6 The Message Transfer Protocol
6.1 Intent
6.2 Messages
6.3 Blocking Requirements
6.4 Message Header
6.5 Transaction Timeout
6.6 Multiple Open Transaction
7 Streams and Functions
7.1 Streams
7.2 Functions
7.3 Stream and Function Allocation
8 Transaction and Conversation Protocols
8.1 Intent
8.2 Transaction Definition
8.3 Transaction Level Requirements
8.4 Conversation Protocols
9 Data Structures
9.1 Intent
9.2 Item
9.3 List
9.4 Localized Character String Items
9.5 Example Data Structures
9.6 Data Item Dictionary
9.7 Variable Item Dictionary
9.8 Object Dictionary
10 Message Detail
10.1 Intent
10.3 Message Usage
10.4 Stream 0 and Function 0
10.5 Stream 1 Equipment Status
10.6 Stream 2 Equipment Control and Diagnostics
10.7 Stream 3 Material Status
10.8 Stream 4 Material Control
10.9 Stream 5 Exception Handling
10.10 Stream 6 Data Collection
10.11 Stream 7 Process Program Management
10.12 Stream 8 Control Program Transfer
10.13 Stream 9 System Errors
10.14 Stream 10 Terminal Services
10.15 Stream 11 Host File Services (Deleted)
10.16 Stream 12 Wafer Mapping
10.17 Stream 13 Data Set Transfers
10.18 Stream 14 Object Services
10.19 Stream 15 Recipe Management
10.20 Stream 16 Processing Management
10.21 Stream 17 Equipment Control and Diagnostics
10.22 Stream 18 Subsystem Control and Data
11 Message Documentation
11.1 Intent
11.2 Standard Form SECS-II Document
12 Units of Measure
12.1 Intent
12.2 Units Symbol
12.3 Compliance
12.4 SECS-II Units of Measure Identifiers
Related Information 1
R1-1 The General Node Transaction Protocol
R1-2 Some Suggested Message Usage
R1-3 Notes on SECS-II Data Transfers
R1-4 Process Programs
R1-5 Suggested Baseline SECS Equipment
Implementation
SEMI E5-1104 © SEMI 1982, 2004 2
1 Purpose
1.1 The SEMI Equipment Communications Standard
Part 2 (SECS-II) defines the details of the interpretation
of messages exchanged between intelligent equipment
and a host. This specification has been developed in
cooperation with the Japan Electronic Industry
Development Association Committee 12 on Equipment
Communications.
1.1.1 It is the intent of this standard to be fully
compatible with SEMI Equipment Communications
Standard E4 (SECS-I). It is also the intent to allow for
compatibility with alternative message transfer
protocols. The details of the message transfer protocol
requirements are contained in Section 6.
1.1.2 It is the intent of this standard to define messages
to such a level of detail that some consistent host soft-
ware may be constructed with only minimal knowledge
of individual equipment. The equipment, in turn, may
be constructed with only minimal knowledge of the
host.
1.1.3 The messages defined in the standard support the
most typical activities required for IC manufacturing.
The standard also provides for the definition of equip-
ment-specific messages to support those activities not
covered by the standard messages. While certain activ-
ities can be handled by common software in the host, it
is expected that equipment-specific host software may
be required to support the full capabilities of the
equipment.
2 Scope
2.1 SECS-II gives form and meaning to messages
exchanged between equipment and host using a
message transfer protocol, such as SECS-I.
2.1.1 SECS-II defines the method of conveying
information between equipment and host in the form of
messages. These messages are organized into
categories of activities, called streams, which contain
specific messages, called functions. A request for
information and the corresponding data transmission is
an example of such an activity.
2.1.2 SECS-II defines the structure of messages into
entities called items and lists of items. This structure
allows for a self-describing data format to guarantee
proper interpretation of the message.
2.1.3 The interchange of messages is governed by a set
of rules for handling messages called the transaction
protocol. The transaction protocol places some mini-
mum requirements on any SECS-II implementation.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 SECS-II applies to equipment and hosts used in the
manufacturing of semiconductor devices. Examples of
the activities supported by the standard are: transfer of
control programs, material movement information,
measurement data, summarized test data, and alarms.
3.1.1 The minimum compliance to this standard
involves meeting the few constraints outlined in Section
8. It is expected that a given piece of equipment will
require only a subset of the functions described in this
standard. The number of functions and the selection of
functions will depend upon the equipment capabilities
and requirements. For each piece of equipment, the
exact format for each function provided must be docu-
mented according to the form outlined in Section 10.
3.1.2 It is assumed that the equipment will define the
messages used in a particular implementation of SECS-
II. It is assumed the host will support equipment
implementation.
4 Referenced Standards
4.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications
Standard 1 Message Transfer (SECS-I)
SEMI E6 — Guide for Semiconductor Equipment
Installation Documentation
4.2 ANSI Standard
1
ANSI X3.4-1977 — Code for Information Interchange
(ASCII)
4.3 IEEE Standard
2
IEEE 754 — Standard for Binary Floating Point
Arithmetic
4.4 The Japan Electronic Industry Development
Association (JEIDA) has requested that the SECS-II
standard incorporate support for the JIS-8 codes for
data exchange. This code would allow support for
1 American National Standards Institute, Headquarters: 1819 L
Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;
Fax: 202.293.9287, New York Office: 11 West 42nd Street, New
York, NY 10036, USA. Telephone: 212.642.4900; Fax:
212.398.0023, Website: www.ansi.org.
2 Institute of Electrical and Electronics Engineers, IEEE Operations
Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey
08855-1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721,
Website: www.ieee.org