semi合集-English.pdf - 第1088页
SEMI E5-1104 © SEMI 1982, 2004 30 Name Format Description Values Where Used PRRECIPEMETHOD 51 Indicates the recipe specification type, wh ether tuning is applied and which method is used: 1 – Recipe only 2 – Recipe with …
SEMI E5-1104 © SEMI 1982, 2004 29
Name Format Description Values Where Used
PRAXI 10 Process axis
0 = Rows (X-axis), top,
increasing
1 = Rows (X-axis), top,
decreasing
2 = Rows (X-axis), bottom,
increasing
3 = Rows (X-axis), bottom,
decreasing
4 = Columns (Y-axis), left,
increasing
5 = Columns (Y-axis), left,
decreasing
6 = Columns (Y-axis), right,
increasing
7 = Columns (Y-axis), right,
decreasing
>7 = Error
8-63 Reserved
S12F1, F3
PRCMDNAME 20 Commands sent to a process
job:
“START”
“STOP”
“PAUSE”
“RESUME”
“ABORT”
“CANCEL”
S16F5
PRDCT 5() Process Die Count
Number of die to be processed or
number of die which have been
processed. (Zero length
indicates not used.)
S12F1, F4
PREVENTID 5() Processing related event
identification:
1 = Waiting for material
2 = Job state change
S16F9
PRJOBID 20 Text string which uniquely
identifies a process job
S16F4, F5, F6,
F7, F9, F11,
F12, F13, F14,
F15, F16, F17,
F20, F23, F25
PRJOBMILESTONE 5() Notification of Processing
status shall have one of the
following values:
1 = Job Setup
2 = Job Processing
3 = Job Processing Complete
4 = Job Complete
5 = Job Waiting for Start
S16F7
PRJOBSPACE 52 The number of process jobs
that can be created
S16F22
PRMTRLORDER 51 Defines the order by which
material in the process jobs
material list will be
processed. Possible values
are assigned as follows:
1 = ARRIVAL – process whichever
material first arrives
2 = OPTIMIZE – process in an
order that maximizes throughput
3 = LIST – follow the order in
the list
S16F29
PRPAUSEEVENT 00 The list of event identifiers,
which may be sent as an
attribute value to a process
job. When a process job
encounters one of these
events it will pause, until it
receives the PRJobCommand
RESUME.
S16F11, F13,
F15
PRPROCESSSTART 11 Indicates that the process
resource start processing
immediately when ready:
TRUE = Automatic Start
FALSE = Manual Start
S16F11, F13,
F15, F25
SEMI E5-1104 © SEMI 1982, 2004 30
Name Format Description Values Where Used
PRRECIPEMETHOD 51 Indicates the recipe
specification type, whether
tuning is applied and which
method is used:
1 – Recipe only
2 – Recipe with variable tuning
S16F11, F13,
F15
PRSTATE 51 Enumerated value, 1 byte
S16F20
PTN 10, 51 Material Port number, 1 byte
S3F17, F21,
F25;
S4F1, F3, F5,
F7, F9, F11,
F13, F15, F17;
S16F13, F17,
F21
QUA 10 Quantity in format, 1 byte
S3F2, F4, F5,
F7
RAC 31, 51 Reset acknowledge, 1 byte
0 = Reset to be done
1 = Reset denied
>1 = Other errors
2-63 Reserved
S2F20
RCMD 20, 31,
51
Remote command code or
string
S2F21, F41,
F49
RCPATTRDATA 0, 10,
11, 20,
3(), 4(),
5()
The contents (value) of a
recipe attribute
S6F25;
S15F13, F15,
F18, F27, F28,
F30, F32, F49,
F51
RCPATTRID 20 The name (identifier) of a
non-identifier recipe attribute
S6F25;
S15F13, F15,
F18, F27, F28,
F30, F32, F49,
F51
RCPBODY 10, 20,
3(), 5()
Recipe body
S15F13, F15,
F18, F27, F32,
F49, F51
RCPCLASS 20 Recipe class
S15F11
RCPCMD 51 Indicates an action to be
performed on a recipe
5 = Delete
8 = Unprotect
9 = Protect
10 = Verify
11 = Link
12 = Unlink
13 = Certify
14 = De-certify
15 = Download
16 = Upload
0-4, 6-7, 17-63 Reserved
S15F21, F22
RCPDEL 51
0 = Delete
1 = Deselect
>1 Reserved
S15F35
RCPDESCLTH 5() The length in bytes of a
recipe section
S15F24
RCPDESCNM 20 Identifies a type of descriptor
of a recipe: “ASDesc”,
“BodyDesc”, “GenDesc”
S15F24
RCPDESCTIME 20 The timestamp of a recipe
section, in the format
“YYYYMMDDhhmmsscc”
S15F24
SEMI E5-1104 © SEMI 1982, 2004 31
Name Format Description Values Where Used
RCPID 20 Recipe identifier. Formatted
text conforming to the
requirements of OBJSPEC.
S15F21, F23,
F28, F29, F30,
F33, F35, F37,
F41, F44, F53
RCPNAME 20 Recipe name
S15F11
RCPNEWID 20 The new recipe identifier
assigned as the result of a
copy or rename operation.
S15F19, F41,
F44
RCPOWCODE 11 Indicates whether any pre-
existing recipe is to be
overwritten (= TRUE) or not
(= FALSE) on download
S15F27, F49
RCPPARNM 20 The name of a recipe variable
parameter. Maximum length
of 256 characters.
S15F25, F33;
S16F3, F11,
F13, F15, F23
RCPPARRULE 20 The restrictions applied to a
recipe variable parameter
setting. Maximum length of
80 characters.
S15F25
RCPPARVAL 10, 11,
20, 3(),
4(), 5()
The initial setting assigned to
a recipe variable parameter.
Text form restricted to
maximum of 80 characters.
S15F25, F33;
S16F3, F11,
F13, F15, F23
RCPRENAME 11 Indicates whether a recipe is
to be renamed (= TRUE) or
copied (= FALSE)
S15F19
RCPSECCODE 10 Indicates the sections of a
recipe requested for transfer
or being transferred:
1 = Generic attributes only
3 = Generic attributes and body
4 = All agent-specific datasets
(zero or more)
7 = Generic attributes, body,
and all agent-specific datasets
8 = Single agent-specific
dataset (zero or one)
11 = Generic attributes, body,
and single agent-specific
datasets
All other values reserved
S15F15, F16,
F17
RCPSECNM 20 Recipe section name:
“Generic”, “Body”, or
“ASDS”
S15F15, F18
RCPSPEC 20 Recipe specifier. The object
specifier of a recipe.
S15F1, F9, F13,
F15, F17, F19,
F27, F28, F31,
F32, F45, F49,
F51, F53;
S16F11, F13,
F15, F23
RCPSTAT 51 The status of a managed
recipe
0 = Does not exist
8 = Unprotected
9 = Protected
S15F10
RCPUPDT 11 Indicates if an existing recipe
is to be updated (= True) or a
new recipe is to be created (=
False)
S15F13
RCPVERS 20 Recipe version
S15F10, F12
READLN 3(), 5() Maximum length to read
S13F5