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SEMI E5-1104 © SEMI 1982, 2004 46 Name Format Description Value s Class PPFormat 51 Indicates the type or ty pes of process programs and recipes th at are supported 1 = Unformatted process programs 2 = Formatted process …

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SEMI E5-1104 © SEMI 1982, 2004 45
Name Format Description Values Class
PPChangeName 10, 20 The PPID which was affected
upon the event of the creation,
editing, or deletion of a Process
Program local to the equipment.
If the PPID Data Item is also
defined and implemented for the
equipment, then the values for
PPChangeName are subject to the
same format restrictions defined
for the PPID Data Item.
DVVAL
PPChangeStatus 51 The action taken on the Process
Program named in
PPChangeName. This variable is
valid upon the event of the
creation, editing, or deletion of a
Process Program local to the
equipment.
1 = Credited
2 = Edited
3 = Deleted
4-63 Reserved
DVVAL
PPError 20 Contains information about a
failure to verify a text process
program
SV or
DVVAL
PPExecName 0, 10,
20
The PPID(s) of the currently
selected Process Program(s). The
selection of a new Process
Program updates this variable. If
multiple Process Programs can be
selected, then this variable is a list
of PPIDs. If the PPID Data Item
is also defined and implemented
for the equipment, then the values
for PPExecName are subject to
the same format restrictions
defined for the PPID Data Item.
SV
SEMI E5-1104 © SEMI 1982, 2004 46
Name Format Description Values Class
PPFormat 51 Indicates the type or types of
process programs and recipes that
are supported
1 = Unformatted process
programs
2 = Formatted process programs
3 = Both unformatted and
formatted process programs
4 = Execution Recipes
5 = Large unformatted process
programs
6 = Large formatted process
programs
7 = Both large unformatted and
large formatted process
programs
8 = Large execution recipes
9 = Both execution recipes and
large execution recipes
10 = Both unformatted and large
unformatted process programs
11 = Both formatted and large
formatted process programs
12 = Both unformatted and large
formatted process programs
13 = Both formatted and large
unformatted process programs
14 = Unformatted, large
unformatted and large formatted
process programs
15 = Formatted, large
unformatted and large formatted
process programs
16 = Formatted, unformatted,
large unformatted, large
formatted process programs
>16 Reserved
SV
PrdRecovery 11 A boolean value that enables
(TRUE) or disables (FALSE) the
equipment-initiated return to
PRODUCTIVE from
UNSCHEDULED DOWNTIME.
ECV
PrdState 20 Default ARAMS Substate Code
for automated transitions to
PRODUCTIVE
SV
PrdTime 5() Accumulation of time in
PRODUCTIVE, reported in
minutes
ECV
PrevARAMSState 20 The ARAMS code corresponding
to the previous state/substate.
Four characters.
SV
PreviousProcessState 51 The previous processing state of
the equipment, before the most
recent process state change
0-63 Reserved
SV
ProcessState 51 The current processing state of the
equipment
0-63 Reserved
SV
RcpChangeName 20 The identifier of the recipe
affected upon the event of the
creation, editing, or deletion of a
recipe
DVVAL
SEMI E5-1104 © SEMI 1982, 2004 47
Name Format Description Values Class
RcpChangeStatus 51 The type of change that occurred
for the recipe indicated in
RcpChangeName
0 = No change
1 = Created
2 = Updated (modified)
3 = Stored (new)
4 = Replaced
5 = Deleted
6 = Copied
7 = Renamed
8,9 Reserved
>10 Reserved
DVVAL
RcpExecName 0, 20 The identifier, or a list of
identifiers, of currently selected
recipes. A zero-length item or list
indicates no recipes are currently
selected.
SV
ReticleIDVerification 11 This equipment constant is used
to indicate whether Reticle ID
verification is required
ECV
ReticleParticleInspection 11 This equipment constant is used
to indicate whether Reticle
Particle Inspection in required.
ECV
SbyRecovery 11 A boolean value that enables
(TRUE) or disables (FALSE) the
equipment-initiated return to
STANDBY from
UNSCHEDULED DOWNTIME
ECV
SbyTime 5() Accumulation of time in
STANDBY, reported in minutes
ECV
SDTime 5() Accumulation of time in
SCHEDULED DOWNTIME,
reported in minutes
ECV
SpoolCountActual 5() Used to keep a count of the
messages actually contained in
the equipment’s spool area.
Multi-block inquire/grant
messages are not spooled and not
included in this count.
SV
SpoolCountTotal 5() Used to keep a count of the total
number of primary messages
directed to the spool, regardless of
whether placed or retained in the
spool. Multi-block inquire/grant
messages are not spooled and not
included in this count.
SV
SpoolFullTime 20 Contains the timestamp from the
time the spool last became full. If
the spool was not filled during the
last spooling period, this will
contain a time value prior to the
current SpoolStartTime. Uses the
same format as the CLOCK
variable data item.
SV
SpoolStartTime 20 Contains the timestamp from the
time spooling last became active.
Uses the same format as the
CLOCK variable data item.
SV