semi合集-English.pdf - 第1108页

SEMI E5-1104 © SEMI 1982, 2004 50 Attribute Name Description Acce ss Format Value “Recorder” The record er specifier of the attached distributed recipe namespace record er . RO 20 “Segments” A list of specifiers of the d…

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SEMI E5-1104 © SEMI 1982, 2004 49
Attribute Name Definition Access Format Value
“AgentSpec_Comments” Comments specific to the agent entered by the author. RW 20 Maximum length is 80
characters.
“AgentSpec_LinkParam” A list of variable parameter definitions modified from
the list in LinkParam
. Valid only for a linked main
recipe. Parameter name and form may not be
changed.
RO 00 List of structures composed
of parameter name, value,
and restrictions.
“Certified” The certification level for the specific agent, assigned
by an authorized user. Reset when AgentSpec
LinkParam is modified. Required for certification
support.
RW 52
“AgentSpec_UD_” Non-standard attribute defined by the supplier or user.
Asterisk indicates the part of the attribute name that is
provided in this definition. Must be preserved exactly
except by the defining entity.
RO 10, 11
20, 3()
4(), 5()
Text form is limited to 80
characters.
Table 7 Collection Event Object
Attribute Name Description Access Format Related Data Items Value
“ObjType” Collection Event Object type RO 20 - “COLLEVENT”
“ObjID” Collection Event Identifiers RO 20 CEID -
“Enabled” Boolean true means reporting is enabled for a
specific CEID.
RW 11 CEED -
“EventSource” Object specifier for object which generates the
event for a specific CEID.
RO 20 EVNTSRC -
“DataReportList” List of Report Identifiers linked to a specific CEID. RO 20 - (list of) RPTID
Table 8 Data Report Object
Attribute Name Description Access Format Related Data Items Value
“ObjType” Data Report Object Type RO 20 - “DATARPT”
“ObjID” Object identifier for a data report RO 20 RPTID -
“DataSource” Source for the variable data, not writable for
predefined provider reports
RO 20 DATASRC -
“AttrList” Returns the attribute (or variable) names that this
report is requesting from the Data source.
RW * - (list of) VID
Table 9 Data Source Object
Attribute Name Description Access Format Related Data Items Value
“ObjType” Data Source Object Type RO 20 - “DataSource”
“ObjID” Identifier of a specific Data Source Object RO 20 DATASRC -
“AttrList” Name of attributes for a specific Data Source
Object
RO * - (list of) VID
Table 10 Distributed Recipe Namespace Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “RNSD”
“ObjID” Text. RO 20
“LockedRecipes” A list of identifiers of all recipes with existing change
request records.
RO 20
SEMI E5-1104 © SEMI 1982, 2004 50
Attribute Name Description Access Format Value
“Recorder” The recorder specifier of the attached distributed
recipe namespace recorder.
RO 20
“Segments” A list of specifiers of the distributed recipe namespace
segments attached to the namespace.
RO 20
Table 11 Distributed Recipe Namespace Manager Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “RNS_MgrD”
“ObjID” The manager’s name. RO 20
Table 12 Distributed Recipe Namespace Recorder Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “RNSDRecorder”
“ObjID” Text. RO 20
“LockedRecipes” List of identifiers of recipes with existing change
request records.
RO 00
“Namespace” Identifies the namespace to which the recorder is
attached. May be set by the manager.
RO 20
“NamespaceManager” Identifies the distributed recipe namespace
manager. May be set by the manager.
RO 20
“Segments” List of specifiers of currently attached segments. RO 00
Table 13 Distributed Recipe Namespace Segment Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “RNSDSegment”
“ObjID” The object name (identifier). RO 20
“Namespace” The name (ObjID) of the namespace to which the
segment belongs. May be set by the manager.
RO 20
“NamespaceManager” Identifies the distributed recipe namespace
manager. May be set by the manager.
RO 20
“RecipeReadOnlyLevel” Used to track the corresponding attribute of the
namespace to which the segment belongs. May be
set by the manager.
RO 52
Table 14 Exception Attributes
Attribute Name Description Access Format Related Data Items Value
“ObjType” The object type RO 20 - “EXCEPTION”
“ObjID” The identifier of a specific
Exception
RO 20 EXID -
“EXType” Identifies the type of exception RO 20 - Select from set:
“ALARM”
“ERROR”
“EXMessage” Text message describing the
abnormal situation monitored.
RO 20 - Max. length of 80 characters
“EXEnabled” Indicates that reporting to the
decision authority on the exception
condition is enabled.
RW 11 - Boolean;
TRUE is enabled.
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Attribute Name Description Access Format Related Data Items Value
“EXRecoveryAction” List of possible recovery actions
(EXRecovery).
RO 20 - list of text
“EXState” Current state of an Exception
Object. The Exception Object
state is usually defined as a
combination of substates and
concurrent states.
RO 20 - Composed from the set:
“CLEARED”
“SET”
“NOTPOSTED”
“POSTED”
“NOTRECOVERING”
“RECOVERING”
“ABORTINGRECOVERY”
Table 15 Execution Recipe Attribute Definition
Attribute Name Definition Acc. Rqmt Form Default Value
Identification Attributes
“ObjType” The object type. RO Y Text: “ERcp” “ERcp”
“ObjID” An identifier derived from Namespace,
Class, Name, and Version.
RO Y Formatted text. -
“Namespace” The name of the originating namespace. RO Y Text. -
“Name” A logical name assigned by the user when
the recipe is created.
RO Y Text. -
“Class” The recipe’s class (e.g., “/PROCESS/”
OR “/PROCESS/LOADER/”).
RO Y Formatted text:
“CLASS/CLASS/..
/CLASS/”
-
“Version” The version of the recipe. RO Y Text. -
Mandatory Attributes
“ExecAttrLength” The length attribute for the attributes of
the execution recipe. Calculated when the
recipe is downloaded and whenever an
attribute changes. Mandatory.
RO Y Unsigned integer -
“ExecChgTime” The timestamp of a change to the
attributes of the execution recipe.
Mandatory.
RO Y Formatted text, timestamp
format
-
“AttrLength” Preserved. Mandatory. RO Y Unsigned integer -
“AttrChgTime” Preserved. Mandatory. RO Y Timestamp format -
“EditTime” Preserved unless recipe is modified.
Timestamp of when the body was created
or modified. Mandatory.
RO Y Formatted text Timestamp
format
-
“BodyLength” Preserved unless recipe is modified.
Length of the recipe’s body, in bytes.
Mandatory.
RO Y Unsigned integer -
“BodyFormat” Indicates the form and format of the
recipe’s body.
RO Y Enumerated unsigned
integer:
0 = source,
1 = object,
> 1 reserved.
0
“Verified” Indicates whether the recipe’s body is
syntactically correct.
RO Y Boolean. FALSE
“Linked” Indicates whether the recipe is linked. RO Y Boolean. FALSE