semi合集-English.pdf - 第1121页
SEMI E5-1104 © SEMI 1982, 2004 63 Stream,Function Name (Mnemonic) Direction S1,F13 Establish Communications Request (CR) S,H<->E,reply Description The purpose of this message is to provide a formal means of ini tia…
SEMI E5-1104 © SEMI 1982, 2004 62
Stream,Function Name (Mnemonic) Direction
S1,F10 Material Transfer Status Data (TSD) M,H<-E
Description
The equipment reports to the host the transfer status of all material ports.
Structure
L,2
1. <TSIP
1
,...,TSIP
n
>
2. <TSOP
1
,...,TSOP
n
>
Exception
A zero-length item means there are no such ports. A zero-length list means there are no ports.
Stream,Function Name (Mnemonic) Direction
S1,F11 Status Variable Namelist Request (SVNR) S,H->E,reply
Description
A request to the equipment to identify certain status variables.
Structure
L,n
1. <SVID
1
>
.
.
n. <SVID
n
>
Exception
A zero length means report all SVIDs.
Stream,Function Name (Mnemonic) Direction
S1,F12 Status Variable Namelist Reply (SVNRR) M,H<-E
Description
The equipment reports to the host the name and units of the requested SVs.
Structure
L,n
1. L,3
1. <SVID
1
>
2. <SVNAME
1
>
3. <UNITS
1
>
2. L,3
.
.
n. L,3
1. <SVID
n
>
2. <SVNAME
n
>
3. <UNITS
n
>
Exception
Zero-length ASCII items for both SVNAME
i
and UNITS
i
indicates that the SVID does not exist.
SEMI E5-1104 © SEMI 1982, 2004 63
Stream,Function Name (Mnemonic) Direction
S1,F13 Establish Communications Request (CR) S,H<->E,reply
Description
The purpose of this message is to provide a formal means of initializing communications at a logical application level both on
power-up and following a break in communications. It should be the following any period where host and Equipment SECS
applications are unable to communicate. An attempt to send an Establish Communications Request (S1,F13) should be repeated
at programmable intervals until an Establish Communications Acknowledge(S1,F14) is received within the transaction timeout
period with an acknowledgement code accepting the establishment.
Structure
L,2
1. <MDLN>
2. <SOFTREV>
Exception
The host sends a zero-length list to the equipment.
Stream,Function Name (Mnemonic) Direction
S1,F14 Establish Communications Request Acknowledge (CRA) S,H<->E
Description
Accept or deny Establish Communications Request (S1,F13). MDLN and SOFTREV are on-line data and are valid only if
COMMACK = 0.
Structure
L,2
1. <COMMACK>
2. L,2
1. <MDLN>
2. <SOFTREV>
Exception
The host sends a zero-length list for item 2 to the equipment.
Stream,Function Name (Mnemonic) Direction
S1,F15 Request OFF-LINE (ROFL) S,H->E,reply
Description
The host requests that the equipment transition to the OFF-LINE state.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S1,F16 OFF-LINE Acknowledge (OFLA) S,H<-E
Description
Acknowledge or error
Structure
<OFLACK>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 64
Stream,Function Name (Mnemonic) Direction
S1,F17 Request ON-LINE (RONL) S,H->E,reply
Description
The host requests that the equipment transition to the ON-LINE state
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S1,F18 ON-LINE Acknowledge (ONLA) S,H<-E
Description
Acknowledge or error
Structure
<ONLACK>
Exception
None
10.5.1 Macro Level Messages
Stream,Function Name (Mnemonic) Direction
S1,F19 Get Attribute (GA) S,H<—>E,reply
5
Description
Request for attribute data relating to the specified object or entity within the equipment.
Structure
L,3
1. <OBJTYPE>
2. L,m [m = number of objects for which attributes requested]
1. <OBJID
1
>
.
.
m. <OBJID
m
>
3. L,n [n = number of attributes requested for each object]
1. <ATTRID
1
>
.
.
n. <ATTRID
n
>
Exception
A zero-length list (m = 0) is a request for attributes of all objects of the specified type. A zero-length list (n = 0) is a request for
all attributes of the object(s)to be returned in a predefined order.
5 Material Movement Management used only the Host to Equipment direction for this message. However, both directions are included for future
compatibility with Recipe Management and other future services.