semi合集-English.pdf - 第1122页
SEMI E5-1104 © SEMI 1982, 2004 64 Stream,Function Name (Mnemonic) Direction S1,F17 Request ON-LINE (RONL) S,H->E,reply Description The host requests that the equipment transition t o the ON-LINE state Structure Header…

SEMI E5-1104 © SEMI 1982, 2004 63
Stream,Function Name (Mnemonic) Direction
S1,F13 Establish Communications Request (CR) S,H<->E,reply
Description
The purpose of this message is to provide a formal means of initializing communications at a logical application level both on
power-up and following a break in communications. It should be the following any period where host and Equipment SECS
applications are unable to communicate. An attempt to send an Establish Communications Request (S1,F13) should be repeated
at programmable intervals until an Establish Communications Acknowledge(S1,F14) is received within the transaction timeout
period with an acknowledgement code accepting the establishment.
Structure
L,2
1. <MDLN>
2. <SOFTREV>
Exception
The host sends a zero-length list to the equipment.
Stream,Function Name (Mnemonic) Direction
S1,F14 Establish Communications Request Acknowledge (CRA) S,H<->E
Description
Accept or deny Establish Communications Request (S1,F13). MDLN and SOFTREV are on-line data and are valid only if
COMMACK = 0.
Structure
L,2
1. <COMMACK>
2. L,2
1. <MDLN>
2. <SOFTREV>
Exception
The host sends a zero-length list for item 2 to the equipment.
Stream,Function Name (Mnemonic) Direction
S1,F15 Request OFF-LINE (ROFL) S,H->E,reply
Description
The host requests that the equipment transition to the OFF-LINE state.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S1,F16 OFF-LINE Acknowledge (OFLA) S,H<-E
Description
Acknowledge or error
Structure
<OFLACK>
Exception
None

SEMI E5-1104 © SEMI 1982, 2004 64
Stream,Function Name (Mnemonic) Direction
S1,F17 Request ON-LINE (RONL) S,H->E,reply
Description
The host requests that the equipment transition to the ON-LINE state
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S1,F18 ON-LINE Acknowledge (ONLA) S,H<-E
Description
Acknowledge or error
Structure
<ONLACK>
Exception
None
10.5.1 Macro Level Messages
Stream,Function Name (Mnemonic) Direction
S1,F19 Get Attribute (GA) S,H<—>E,reply
5
Description
Request for attribute data relating to the specified object or entity within the equipment.
Structure
L,3
1. <OBJTYPE>
2. L,m [m = number of objects for which attributes requested]
1. <OBJID
1
>
.
.
m. <OBJID
m
>
3. L,n [n = number of attributes requested for each object]
1. <ATTRID
1
>
.
.
n. <ATTRID
n
>
Exception
A zero-length list (m = 0) is a request for attributes of all objects of the specified type. A zero-length list (n = 0) is a request for
all attributes of the object(s)to be returned in a predefined order.
5 Material Movement Management used only the Host to Equipment direction for this message. However, both directions are included for future
compatibility with Recipe Management and other future services.

SEMI E5-1104 © SEMI 1982, 2004 65
Stream,Function Name (Mnemonic) Direction
S1,F20 Attribute Data (AD) M,H<—>E
Description
This message is used to transfer the requested set of object attributes. The order of requested objects and attributes is retained
from the primary message.
Structure
L,2
1. L,m [m = number of objects for which data is sent]
1. L,n [n = number of attributes returned for OBJID
1
]
1. <ATTRDATA
1
>
.
.
n. <ATTRDATA
n
>
.
.
m. L,n [n = number of attributes returned for OBJID
m
]
1. <ATTRDATA
1
>
.
.
n. <ATTRDATA
n
>
2. L,p [p = # errors reported]
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If m = 0, it indicates that the specified OBJTYPE is unknown. If any n = 0, it indicates that the corresponding object was not
found. If any ATTRDATA item is reported as a zero-length item, it indicates that the specified attribute does not exist. If no
errors were found, p = 0.
10.6 Stream 2 Equipment Control and Diagnostics — Messages which deal with control of the equipment from the
host. This includes all remote operations and equipment self-diagnostics and calibration but specifically excludes
the control operations which are associated with material transfer (see Stream 4), loading of executive and boot
programs (Stream 8), and all file and operating system calls (Streams 10, 13). See also continuations in Stream 17.
Stream,Function Name (Mnemonic) Direction
S2,F0 Abort Transaction (S2F0) S,H<->E
Description
Same form as S1,F0
Structure
Exception