semi合集-English.pdf - 第1123页

SEMI E5-1104 © SEMI 1982, 2004 65 Stream,Function Name (Mnemonic) Direction S1,F20 Attribute Data (AD) M,H<—>E Description This message is used to transfer the requested set of object at tributes. The order of requ…

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SEMI E5-1104 © SEMI 1982, 2004 64
Stream,Function Name (Mnemonic) Direction
S1,F17 Request ON-LINE (RONL) S,H->E,reply
Description
The host requests that the equipment transition to the ON-LINE state
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S1,F18 ON-LINE Acknowledge (ONLA) S,H<-E
Description
Acknowledge or error
Structure
<ONLACK>
Exception
None
10.5.1 Macro Level Messages
Stream,Function Name (Mnemonic) Direction
S1,F19 Get Attribute (GA) S,H<—>E,reply
5
Description
Request for attribute data relating to the specified object or entity within the equipment.
Structure
L,3
1. <OBJTYPE>
2. L,m [m = number of objects for which attributes requested]
1. <OBJID
1
>
.
.
m. <OBJID
m
>
3. L,n [n = number of attributes requested for each object]
1. <ATTRID
1
>
.
.
n. <ATTRID
n
>
Exception
A zero-length list (m = 0) is a request for attributes of all objects of the specified type. A zero-length list (n = 0) is a request for
all attributes of the object(s)to be returned in a predefined order.
5 Material Movement Management used only the Host to Equipment direction for this message. However, both directions are included for future
compatibility with Recipe Management and other future services.
SEMI E5-1104 © SEMI 1982, 2004 65
Stream,Function Name (Mnemonic) Direction
S1,F20 Attribute Data (AD) M,H<—>E
Description
This message is used to transfer the requested set of object attributes. The order of requested objects and attributes is retained
from the primary message.
Structure
L,2
1. L,m [m = number of objects for which data is sent]
1. L,n [n = number of attributes returned for OBJID
1
]
1. <ATTRDATA
1
>
.
.
n. <ATTRDATA
n
>
.
.
m. L,n [n = number of attributes returned for OBJID
m
]
1. <ATTRDATA
1
>
.
.
n. <ATTRDATA
n
>
2. L,p [p = # errors reported]
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If m = 0, it indicates that the specified OBJTYPE is unknown. If any n = 0, it indicates that the corresponding object was not
found. If any ATTRDATA item is reported as a zero-length item, it indicates that the specified attribute does not exist. If no
errors were found, p = 0.
10.6 Stream 2 Equipment Control and Diagnostics — Messages which deal with control of the equipment from the
host. This includes all remote operations and equipment self-diagnostics and calibration but specifically excludes
the control operations which are associated with material transfer (see Stream 4), loading of executive and boot
programs (Stream 8), and all file and operating system calls (Streams 10, 13). See also continuations in Stream 17.
Stream,Function Name (Mnemonic) Direction
S2,F0 Abort Transaction (S2F0) S,H<->E
Description
Same form as S1,F0
Structure
Exception
SEMI E5-1104 © SEMI 1982, 2004 66
Stream,Function Name (Mnemonic) Direction
S2,F1 Service Program Load Inquire (SPI) S,H<->E,reply
Description
Either the host or equipment wants to send the specified program.
Structure
L,2
1. <SPID>
2. <LENGTH>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F2 Service Program Load Grant (SPG) S,H<->E
Description
Provides permission to load
Structure
<GRANT>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F3 Service Program Send (SPS) M,H<->E, reply
Description
The data associated with the S2,F1 inquire is sent. If S2,F3 is multi-block, it must be preceded by the S2,F1/S2,F2 Inquire/Grant
transaction.
Structure
<SPD>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F4 Service Program Send Acknowledge (SPA) S,H<->E
Description
Acknowledge or error
Structure
<SPAACK>
Exception
None