semi合集-English.pdf - 第1126页

SEMI E5-1104 © SEMI 1982, 2004 68 Stream,Function Name (Mnemonic) Direction S2,F10 Service Program Results Data (SRD) M,H<-E Description Get the results back Structure <SPR> Exception A zero-length item means SP…

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SEMI E5-1104 © SEMI 1982, 2004 67
Stream,Function Name (Mnemonic) Direction
S2,F5 Service Program Load Request (SPR) S,H<->E,reply
Description
A service program is requested.
Structure
<SPID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F6 Service Program Load Data (SPD) M,H<->E
Description
A service program is sent.
Structure
<SPD>
Exception
A zero-length item means that the requested program cannot be returned.
Stream,Function Name (Mnemonic) Direction
S2,F7 Service Program Run Send (CSS) S,H->E,reply
Description
Start the requested program
Structure
<SPID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F8 Service Program Run Acknowledge (CSA) S,H<-E
Description
Acknowledge or error
Structure
<CSAACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F9 Service Program Results Request (SRR) S,H->E,reply
Description
Ask for results of service program
Structure
<SPID>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 68
Stream,Function Name (Mnemonic) Direction
S2,F10 Service Program Results Data (SRD) M,H<-E
Description
Get the results back
Structure
<SPR>
Exception
A zero-length item means SPR does not exist.
Stream,Function Name (Mnemonic) Direction
S2,F11 Service Program Directory Request (SDR) S,H<->E,reply
Description
There may be more than one service program.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F12 Service Program Directory Data (SDD) S,H<->E
Description
A list of service program names.
Structure
L,n
1. <SPID
1
>
.
.
n. <SPID
n
>
Exception
If n = 0, there are no service programs.
SEMI E5-1104 © SEMI 1982, 2004 69
Stream,Function Name (Mnemonic) Direction
S2,F13 Equipment Constant Request (ECR) S,H->E,reply
Description
Constants such as for calibration, servo gain, alarm limits, data collection mode, and other values that are changed infrequently
can be obtained using this message.
Structure
The following structure is approved for all item formats and should be used by all new
implementations:
L,n
1. <ECID
1
>
.
.
n. <ECID
n
>
The following structure is included for compatibility with previous implementations
and may only be used for items of format 3() and 5():
<ECID
1
, . . . , ECID
n
>
Exception
A zero-length list (structure1) or item (structure2) means report all ECVs according to a predefined order.
Stream,Function Name (Mnemonic) Direction
S2,F14 Equipment Constant Data (ECD) M,H<-E
Description
Data Response to S2,F13 in the order requested.
Structure
L,n
1. <ECV
1
>
2. <ECV
2
>
.
.
n. <ECV
n
>
Exception
A zero-length list item for ECV
i
means that ECID
i
does not exist. The list format for this data item is not allowed, except in this
case.