semi合集-English.pdf - 第1147页

SEMI E5-1104 © SEMI 1982, 2004 89 Stream,Function Name (Mnemonic) Direction S3,F13 Material ID Send (MIS) S,H->E,reply Description The host sends the Material ID of th e material at the specified port. Structure L,2 1…

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SEMI E5-1104 © SEMI 1982, 2004 88
Stream,Function Name (Mnemonic) Direction
S3,F9 Material ID Equate Send (IES) S,H<-E,reply
Description
Provide an alternative name to be used as equivalent to the original material ID.
Structure
L,2
1. <MID>
2. <EMID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F10 Material ID Equate Acknowledge (IEA) S,H->E
Description
Acknowledge or error
Structure
<ACKC3>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F11 Material ID Request (MIDR) S,H<-E,reply
Description
The equipment requests the Material ID of the material at the specified port.
Structure
<PTN>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F12 Material ID Request Acknowledge (MIRA) S,H->E
Description
The host acknowledges the request for the Material ID. If the use of a request/acknowledge/send/acknowledge conversation is
required, it indicated by the acknowledge code MIDRA = 2. In this case, the send/acknowledge transaction is S3,F13, S3,Fl4. A
timeout when electing S3,F13 is indicated by S9,F13 or a restart of the conversation, with S3,F11.
Structure
L,3
1. <PTN>
2. <MIDRA>
3. <MID>
Note: For all cases except MIDRA = 0 (accepted, <MID> follows), the <MID> will be
ignored by the receiver of message S3,F12. When MIDRA = 0, a zero-length MID
indicates that no MID is available.
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 89
Stream,Function Name (Mnemonic) Direction
S3,F13 Material ID Send (MIS) S,H->E,reply
Description
The host sends the Material ID of the material at the specified port.
Structure
L,2
1. <PTN>
2. <MID>
Note: A zero-length MID indicates that no MID is available.
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F14 Material ID Acknowledge (MIA) S,H<-E
Description
Acknowledge or error
Structure
<MIDAC>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F15 Materials Multi-Block Inquire (MMBI) S,H->E,reply
Description
This message requests permission to send a multi-block message based upon a maximum length of the total message. It must be
sent prior to sending any multi-block primary message in Stream 3.
Structure
L,2
1. <DATAID>
2. <DATALENGTH>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F16 Materials Multi-Block Grant (MMBG) S,H<-E
Description
This message grants or denies permission to send a multi-block primary message in Stream 3.
Structure
<GRANT>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 90
Stream,Function Name (Mnemonic) Direction
S3,F17 Carrier Action Request M,H->E,reply
Description
This message requests an action to be performed for a specified carrier. If multi-block, this message must be preceded by the
S3,F11/F12 transaction.
Structure
L,5
1. <DATAID>
2. <CARRIERACTION>
3. <CARRIERID>
4. <PTN>
5. L,n n = number of carrier attributes
1. L,2
1. <CATTRID
1
>
2. <CATTRDATA
1
>
.
.
n. L,2
1. <CATTRID
n
>
2. <CATTRDATA
n
>
Exception
If n = 0, then no carrier attributes are included. If CARRIERID is not a zero-length item, then PTN may be omitted (a zero-
length item). ATTRID and ATTRDATA may be substituted for CATTRID and CATTRDATA respectively.
ReticlePodLocationID may be used as one of <CATTRID> when the CARRIERACTION is PodRelease and the carrier is not at
a Load Port.
Stream,Function Name (Mnemonic) Direction
S3,F18 Carrier Action Acknowledge S,H<-E
Description
This message acknowledges the carrier action request.
Structure
L,2
1. <CAACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.