semi合集-English.pdf - 第1175页
SEMI E5-1104 © SEMI 1982, 2004 117 Stream,Function Name (Mnemonic) Direction S5,F12 Exception Clear Confirm (EXCC) S,H->E Description Host confirms receipt of S5,F11 message from the equipment. Structure Header only E…

SEMI E5-1104 © SEMI 1982, 2004 116
Stream,Function Name (Mnemonic) Direction
S5,F9 Exception Post Notify (EXPN) S,H<-E,[reply]
Description
This message provides the means to inform a host system that an exception condition is ‘set’. Optionally, recovery actions for
the exception may be sent.
Structure
L,5
1. <TIMESTAMP>
2. <EXID>
3. <EXTYPE>
4. <EXMESSAGE>
5. L,n
1. <EXRECVRA
1
>
.
.
.
n. <EXRECVRA
n
>
Exception
A zero-length list (n = 0) shall be sent when there are no possible recovery actions.
This is a single block message. The text in each of the EXRECVRA data items may need to be restricted in length to meet the
single block requirement.
Stream,Function Name (Mnemonic) Direction
S5,F10 Exception Post Confirm (EXPC) S,H->E
Description
Host confirms receipt of S5,F9 message from the equipment.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F11 Exception Clear Notify (EXCN) S,H<-E,[reply]
Description
This message provides the means to inform a host system that an exception/alarm condition is no longer active (set).
Structure
L,4
1. <TIMESTAMP>
2. <EXID>
3. <EXTYPE>
4. <EXMESSAGE>
Exception
EXMESSAGE can be used to provide the reason that the exception cleared.

SEMI E5-1104 © SEMI 1982, 2004 117
Stream,Function Name (Mnemonic) Direction
S5,F12 Exception Clear Confirm (EXCC) S,H->E
Description
Host confirms receipt of S5,F11 message from the equipment.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F13 Exception Recover Request (EXRR) S,H->E,reply
Description
Request that the entity which is experiencing an error execute a recovery action.
Structure
L,2
1. <EXID>
2. <EXRECVRA>
Exception
Stream,Function Name (Mnemonic) Direction
S5,F14 Exception Recover Acknowledge (EXRA) S,H<-E
Description
The entity indicates a response to the recovery request.
Structure
L,2
1. <EXID>
2. L,2
1. <ACKA>
2. L,m (m = {0,2})
1. <ERRCODE>
2. <ERRTEXT>
Exception
The list m can be zero length, if the recovery request was accepted.

SEMI E5-1104 © SEMI 1982, 2004 118
Stream,Function Name (Mnemonic) Direction
S5,F15 Exception Recovery Complete Notify (EXRCN) S,H<-E,[reply]
Description
Allows the service provider to inform the controller/host that the recovery operation completed on a specific exception and an
error code if the recovery terminated abnormally.
Structure
L,3
1. <TIMESTAMP>
2. <EXID>
3. L,2
1. <ACKA>
2. L,m (m = {0,2})
1. <ERRCODE>
2. <ERRTEXT>
Exception
This list m can be of zero length if the recovery was successful.
Stream,Function Name (Mnemonic) Direction
S5,F16 Exception Recovery Complete Confirm (EXRCC) S,H->E
Description
Host confirms receipt of S5,F15 message from the equipment.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F17 Exception Recovery Abort Request (EXRAR) S,H->E,reply
Description
Stop the recovery procedure on a specific exception.
Structure
1. <EXID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F18 Exception Recovery Abort Acknowledge (EXRAA) S,H<-E
Description
Indicate the success of the request for Recovery Abort.
Structure
L,2
1. <EXID>
2. L,2
1. <ACKA>
2. L,m (m = {0,2})
1. <ERRCODE>
2. <ERRTEXT>
Exception
The list m can be of zero length if the abort was successful.