semi合集-English.pdf - 第1191页

SEMI E5-1104 © SEMI 1982, 2004 133 Stream,Function Name (Mnemonic) Direction S7,F8 Process Program ID Data (PID) S,H->E Description This message is used to transmit a singl e matrix entry in response to S7,F7. Structu…

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SEMI E5-1104 © SEMI 1982, 2004 132
Stream,Function Name (Mnemonic) Direction
S7,F4 Process Program Acknowledge (PPA) S,H<->E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F5 Process Program Request (PPR) S,H<->E,reply
Description
This message is used to request the transfer of a process program.
Structure
<PPID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F6 Process Program Data (PPD) M,H<->E
Description
This message is used to transfer a process program.
Structure
L,2
1. <PPID>
2. <PPBODY>
Exception
A zero-length list means request denied.
NOTE 7: The equipment-to-host transfer of the process program, denoted by the R bit in the header (R = 1), provides the
mechanism for the host computer to receive process programs created on the equipment. This allows use of the equipment
without having process program generation capabilities on the host.
Stream,Function Name (Mnemonic) Direction
S7,F7 Process Program ID Request (PIR) S,H<-E,reply
Description
This message is used to request the PPID for use on the material identified.
Structure
<MID>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 133
Stream,Function Name (Mnemonic) Direction
S7,F8 Process Program ID Data (PID) S,H->E
Description
This message is used to transmit a single matrix entry in response to S7,F7.
Structure
L,2
1. <PPID>
2. <MID>
Exception
A zero-length list returned means no such MID or other error.
Stream,Function Name (Mnemonic) Direction
S7,F9 M/P M Request (MMR) S,H<->E,reply
Description
This message is used to request the transmission of the material/process matrix. If the message is from the host, the response
will be the current matrix in the equipment. If the message is from the equipment, the response will be a new matrix to initialize
the equipment.
Structure
Header only
Exception
None
NOTE 8: M/PM defines the Material/Process Matrix. The Material/Process Matrix is a table which links the material to the
process program to be used in processing the material.
SEMI E5-1104 © SEMI 1982, 2004 134
Stream,Function Name (Mnemonic) Direction
S7,F10 M/P M Data (MMD) M,H<->E
Description
In the response to S7,F9, the equipment will transmit the current matrix it contains. The matrix will be the sum of all matrix
updates transmitted since initialization less the completed material whose linkages have been deleted. Programs with no pending
material will be deleted from the matrix but not from the equipment program directory.
Structure
L,n number of process programs
1. L,2
1. <PPID
1
>
2. L,a (number of MID for this PPID)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Function 10 Example 2 process programs (1 and 3 MID, respectively)
L,2
L,2
1. <PPID
1
>
2. L,1
1. <MID
a
>
L,2
1. <PPID
2
>
2. L,3
1. <MID
b
>
2. <MID
c
>
3. <MID
d
>
Exception
a = 0 indicates that this PPID will be used for all material processed. The last default transmitted will be the one used; all other
entries will be deleted from the active matrix. A zero-length list returned means no such matrix.