semi合集-English.pdf - 第1195页

SEMI E5-1104 © SEMI 1982, 2004 137 Stream,Function Name (Mnemonic) Direction S7,F16 Matrix Mode Select Acknowledge (MM A) S,H<-E Description Acknowledge or error Structure <ACKC7> Exception None NOTE 9: The matr…

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SEMI E5-1104 © SEMI 1982, 2004 136
Stream,Function Name (Mnemonic) Direction
S7,F13 Delete M/P M Entry Send (DES) S,H->E,[reply]
Description
This message is used to delete program to material linkages in the M/PM of the equipment.
Structure
L,n (number of process programs)
1. L,2
1. <PPID
1
>
L,a (number of MID's using PPID)
1. <MID
1
>
.
.
a. <MID
a
>
2. L,2
.
.
n. L,2
1. <PPID
n
>
2. L,b
1. <MID
1
>
.
.
b. <MID
b
>
Exception
A delete consisting of a zero-length means delete all entries and generate a S7,F9 request to initialize matrix.
Stream,Function Name (Mnemonic) Direction
S7,F14 Delete M/P M Entry Acknowledge (DEA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F15 Matrix Mode Select Send (MMS) S,H->E,reply
Description
This message is used by the host to change the method of process program selection in the equipment which might not support
all modes.
Structure
<MMODE>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 137
Stream,Function Name (Mnemonic) Direction
S7,F16 Matrix Mode Select Acknowledge (MMA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
NOTE 9: The matrix structure allows the program linkages to be established for each MID or the multi-MID production plans
for an extended period of time. The host system makes the choice of operating mode. By continuous updates to the equipment
matrix, automatic system backup is achieved.
Stream,Function Name (Mnemonic) Direction
S7,F17 Delete Process Program Send (DPS) S,H->E,reply
Description
This message is used by the host to request the equipment to delete process programs from equipment storage.
Structure
L,n (Number of process programs to be deleted)
1. <PPID
1
>
.
.
n. <PPID
n
>
Exception
If n = 0, then delete all.
Stream,Function Name (Mnemonic) Direction
S7,F18 Delete Process Program Acknowledge (DPA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F19 Current EPPD Request (RER) S,H->E,reply
Description
This message is used to request the transmission of the current equipment process program directory (EPPD). This is a list of all
the PPIDs of the process programs stored in the equipment.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 138
Stream,Function Name (Mnemonic) Direction
S7,F20 Current EPPD Data (RED) M,H<-E
Description
This message is used to transmit the current EPPD.
Structure
L,n (number of process programs in the directory)
1. <PPID
1
>
.
.
n. <PPID
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F21 Equipment Process Capabilities Request (PCR) S,H->E,reply
Description
This message is used to request the Equipment Process Capabilities Data (PCD).
Structure
Header only
Exception
None