semi合集-English.pdf - 第1215页

SEMI E5-1104 © SEMI 1982, 2004 157 Stream,Function Name (Mnemonic) Direction S12,F2 Map Set-up Da ta Acknowledge (MSDA) S,H->E Description Acknowledgment of receipt of complete set of map set-up par a meters. Structur…

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SEMI E5-1104 © SEMI 1982, 2004 156
10.16.3.3.1 Figures 9 and 10 summarize the conversation protocol in the form of a flow chart. Since a single
transmit inquire/grant can be used for one of three message function pairs, the application is required to examine
MAPFT, is received as part of the map setup data to determine the appropriate function to follow. If the appropriate
function is not transmitted, the conversation is aborted and the error is reported using the appropriate error reporting
stream and function.
Stream,Function Name (Mnemonic) Direction
S12,F0 Abort Transaction (S12F0) S,H<->E
Description
Same form as S1F0.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S12,F1 Map Set-up Data Send (MSDS) S,H<-E,reply
Description
Used to send all of the map set-up data common to all formats and required to link the data map with the physical wafer.
Structure
L,15
1. <MID>
2. <IDTYP>
3. <FNLOC>
4. <FFROT>
5. <ORLOC>
6. <RPSEL>
7. L,n
1. <REFP
x
REFP
y
>
.
.
n. <REFP
x
REFP
y
>
8. <DUTMS>
9. <XDIES>
10. <YDIES>
11. <ROWCT>
12. <COLCT>
13. <NULBC>
14. <PRDCT>
15. <PRAXI>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 157
Stream,Function Name (Mnemonic) Direction
S12,F2 Map Set-up Data Acknowledge (MSDA) S,H->E
Description
Acknowledgment of receipt of complete set of map set-up parameters.
Structure
<SDACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F3 Map Set-up Data Request (MSDR) S,H<-E,reply
Description
Used to request set-up data from the host for the product ready to be processed at the equipment (common to all formats).
Structure
L,9
1. <MID>
2. <IDTYP>
3. <MAPFT>
4. <FNLOC>
5. <FFROT>
6. <ORLOC>
7. <PRAXI>
8. <BCEQU...>
9. <NULBC>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 158
Stream,Function Name (Mnemonic) Direction
S12,F4 Map Set-up Data (MSD) S,H->E
Description
Used to send all of the map set-up data required to link the data map with the physical wafer.
Structure
L,15
1. <MID>
2. <IDTYP>
3. <FNLOC>
4. <ORLOC>
5. <RPSEL>
6. L,n
1. <REFP
x
REFP
y
>
.
.
n. <REFP
x
REFP
y
>
7. <DUTMS>
8. <XDIES>
9. <YDIES>
10. <ROWCT>
11. <COLCT>
12. <PRDCT>
13. <BCEQU>
14. <NULBC>
15. <MLCL>
Exception
A zero-length list returned means no such MID.
Stream,Function Name (Mnemonic) Direction
S12,F5 Map Transmit Inquire (MAPTI) S,H<-E,reply
Description
Used to prepare the host for map transmission. S12,F5 must precede all S12,F7-8,F9-10, & F11-12 transactions.
Structure
L,4
1. <MID>
2. <IDTYP>
3. <MAPFT>
4. <MLCL>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F6 Map Transmit Grant (MAPTG) S,H->E
Description
Provides permission to transfer.
Structure
<GRNT1>
Exception
None