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SEMI E5-1104 © SEMI 1982, 2004 161 Stream,Function Name (Mnemonic) Direction S12,F13 Map Data Request Type 1 (MDR1) S,H<-E,reply Description Used to request map data for product at equipm ent process station in row or…

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SEMI E5-1104 © SEMI 1982, 2004 160
Stream,Function Name (Mnemonic) Direction
S12,F10 Map Data Acknowledge Type 2 (MDA2) S,H->E
Description
Acknowledge or error
Structure
<MDACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F11 Map Data Send Type 3 (MDS3) M,H<-E,reply
Description
Used to send map data from the equipment in cartesian coordinate format. Bin values may or may not be included in the
message. If S12,F11 is multi-block, it must be preceded by the S12,F5/S12,F6 Inquire/Grant transaction.
Structure
L,3
1. <MID>
2. <IDTYP>
3. L,n
1. L,2
1. <XYPOS1
x
XYPOS1
y
>
2. <BINLT1...>
2. L,2
.
.
n. L,2
1. <XYPOS
n
>
2. <BINLT
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F12 Map Data Acknowledge Type 3 (MDA3) S,H->E
Description
Acknowledge or error
Structure
<MDACK>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 161
Stream,Function Name (Mnemonic) Direction
S12,F13 Map Data Request Type 1 (MDR1) S,H<-E,reply
Description
Used to request map data for product at equipment process station in row or column format.
Structure
L,2
1. <MID>
2. <IDTYP>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F14 Map Data Type 1 (MD1) M,H->E
Description
Used to send map data from the host to the equipment in row or column format.
Structure
L,3
1. <MID>
2. <IDTYP>
3. L,n
1. L,2
1. <RSINF
x1
RSINF
y1
RSIN
d
>
2. <BINLT...>
2. L,2
.
.
n. L,2
1. <RSINF
n
>
2. <BINLT
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F15 Map Data Request Type 2 (MDR2) S,H<-E,reply
Description
Used to request map data for product at an equipment process station, in array format.
Structure
L,2
1. <MID>
2. <IDTYP>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 162
Stream,Function Name (Mnemonic) Direction
S12,F16 Map Data Type 2 (MD2) M,H->E
Description
Used to send map data from the host to the equipment in array format.
Structure
L,4
1. <MID>
2. <IDTYP>
3. <STRP
x
STRP
y
>
4. <BINLT...>
Exception
A zero-length list returned means no such MID.
Stream,Function Name (Mnemonic) Direction
S12,F17 Map Data Request Type 3 (MDR3) S,H<-E,reply
Description
Used to request map data for product at an equipment process station in cartesian coordinate format.
Structure
L,3
1. <MID>
2. <IDTYP>
3. <SDBIN>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F18 Map Data Type 3 (MD3) M,H->E
Description
Used to send map data from the host to the equipment in cartesian coordinate format. Bin values may or may not be included.
Structure
L,3
1. <MID>
2. <IDTYP>
3. L,n
1. L,2
1. <XYPOS
x1
XYPOS
y1
>
2. <BINLT
1
...>
2. L,2
.
.
n. L,2
1. <XYPOS
n
>
2. <BINLT
n
>
Exception
A zero-length list returned means no such MID.