semi合集-English.pdf - 第1269页

SEMI E5-1104 © SEMI 1982, 2004 211 Stream,Function Name (Mnemonic) Direction S15,F27 Recipe Download Request M,H->E,reply Description This message is used to send a recipe to a reci pe executor. If multi-block, it sha…

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SEMI E5-1104 © SEMI 1982, 2004 210
Stream,Function Name (Mnemonic) Direction
S15,F25 Recipe Parameter Update Request M,H<->E,reply
Description
This message is used to update the variable parameter definitions for a specific agent. If multi-block, it must be preceded by the
S15,F1/F2 inquire/grant transaction.
Structure
L,4
1. <DATAID>
2. <RMNSSPEC>
3. <AGENT>
4. L,n
1. L,3
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
3. <RCPPARRULE
1
>
.
.
n. L,3
1. <RCPPARNM
n
>
2. <RCPPARVAL
n
>
3. <RCPPARRULE
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F26 Recipe Parameter Update Acknowledge M, H<->E
Description
This message indicates the successful performance of the request or otherwise indicates the nature of error(s) that occurred.
Structure
L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 211
Stream,Function Name (Mnemonic) Direction
S15,F27 Recipe Download Request M,H->E,reply
Description
This message is used to send a recipe to a recipe executor. If multi-block, it shall be preceded by the S15,F1/S15,F2
inquire/grant transaction.
Structure
L,5
1. <DATAID>
2. <RCPOWCODE>
3. <RCPSPEC>
4. L,m
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
5. <RCPBODY>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F28 Recipe Download Acknowledge M,H<-E
Description
This message is used to acknowledge that a recipe has been received by the recipe executor. If the recipe was successfully
verified, the results are returned to the sender. RCPID contains the identifier of a derived object form recipe if created during
verification.
Structure
L,3
1. <RCPID>
2. L,n (n = # of attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
n. L,2
1. <RCPATTRID
n
>
2. <RCPATTRDATA
n
>
3. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If item is a zero length item, no derived object form recipe was originated. n = 0 if and only if the recipe was not verified or
failed verification. p = 0 if and only if RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 212
Stream,Function Name (Mnemonic) Direction
S15,F29 Recipe Verify Request M,H->E,reply
Description
This message is used to request verification of one or more recipes by a recipe executor. If multi-block, it shall be preceded by
the S15F1,F2 inquire/grant transaction. The operation identifier OPID, used where multiple verification requests may be
outstanding, may be zero if no further verifications will be requested before all current verification requests are completed by the
recipe executor. Otherwise, OPID is generated to be unique for the requestor. RESPEC is the object specifier for the recipe
executor.
Structure
L,4
1. <DATAID>
2. <OPID>
3. <RESPEC>
4. L,m
1. <RCPID
1
>
.
.
m. <RCPID
m
>
Exception
If RESPEC is a zero length item, the target is the recipient of the message.