semi合集-English.pdf - 第1273页

SEMI E5-1104 © SEMI 1982, 2004 215 Stream,Function Name (Mnemonic) Direction S15,F33 Recipe Select Request M,H->E,reply Description This message is used to r equest the selection of one or more execution recipes. If m…

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SEMI E5-1104 © SEMI 1982, 2004 214
Stream,Function Name (Mnemonic) Direction
S15,F32 Recipe Upload Data M,H<-E
Description
This message is used to send an execution recipe from a recipe executor.
Structure
L,4
1. <RCPSPEC>
2. L,m (m = # attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
3. <RCPBODY>
4. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 215
Stream,Function Name (Mnemonic) Direction
S15,F33 Recipe Select Request M,H->E,reply
Description
This message is used to request the selection of one or more execution recipes. If multi-block, it shall be preceded by the
S15,F1/S15,F2 inquire/grant transaction.
Structure
L,3
1. <DATAID>
2. <RESPEC>
3. L,r (r = # selections)
1. L,2
1. <RCPID
1
> (1st recipe selection)
2. L,p (p = # parameter settings for 1st recipe)
1. L,2
1. <RCPPARNM
11
>
2. <RCPPARVAL
11
>
.
.
p. L,2
1. <RCPPARNM
1p
>
2. <RCPPARVAL
1p
>
.
.
r. L,2
1. <RCPID
r
> (rth recipe selection)
2. L,s (s = # parameter settings for rth recipe)
1. L,2
1. <RCPPARNM
r1
>
2. <RCPPARVAL
r1
>
.
.
s. L,2
1. <RCPPARNM
rs
>
2. <RCPPARVAL
rs
>
Exception
If the list of parameter settings for a recipe selection is of zero length, then no parameter settings are specified for the
corresponding recipe.
SEMI E5-1104 © SEMI 1982, 2004 216
Stream,Function Name (Mnemonic) Direction
S15,F34 Recipe Select Acknowledge M,H<-E
Description
This message is used to acknowledge the request for recipe selection.
Structure
L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F35 Recipe Delete Request M,H->E,reply
Description
This message is used to request that one or more recipes be deleted or deselected. If multi-block, it shall be preceded by the
S15,F1/S15,F2 inquire/grant transaction.
Structure
L,4
1. <DATAID>
2. <RESPEC>
3. <RCPDEL>
4. L,n (n = # recipes deselected)
1. <RCPID
1
>
.
.
n. <RCPID
n
>
Exception
If n = 0 and recipes are to be deselected (RCPDEL = 1), then all currently-selected recipes are indicated.